Tabletop manual type compatible with φ2" to φ6" substrates! With dispenser.
The MSC-300 model is a manual tabletop spin coater with a dispenser that supports substrates ranging from φ2" to φ6". It is equipped with two dispense arms for automatic application. Condition settings are performed via a touch panel on the operation panel. Each processing mode is displayed on the touch panel during operation. For more details, please contact us or refer to the catalog.
Inquire About This Product
basic information
【Features】 ○ Equipped with a dispenser ○ Compatible with substrates from φ2" to φ6" ○ Tabletop manual type ○ Equipped with 2 dispense arms → Can be applied automatically 【Specifications】 ○ External dimensions: W360×D435×H355mm ○ Motor: 200W AC servo motor 100V ○ Rotational speed: 0–3000rpm (MAX 5000rpm is optional) ○ Speed display: Digital display ○ Rotational accuracy: ±1rpm ○ Dispensing arms: 2, driven by stepping motors ○ Dispensing method: N2 pressurized by a pressure tank ○ Number of programs: 10 programs, 50 steps ○ Sample stage: Vacuum suction -50Kpa (vacuum pump is optional) ○ Cup: SUS304 φ300 with drawing processing ○ Exhaust/Waste liquid: Exhaust is optional, waste liquid is cup-stopped ● For more details, please contact us or refer to the catalog.
Price information
Please contact us.
Delivery Time
※Please contact us.
Applications/Examples of results
For more details, please contact us or refer to the catalog.
catalog（1）
Download All Catalogs
Company information
Japan Create has been challenging cutting-edge technologies to respond to the diversification of the semiconductor industry with high precision, labor-saving, and miniaturization. We seek infinite possibilities in high technology and create reliable know-how that matches user needs with our uniqueness. We will continue to strive towards high-level technology.