Technology has been incorporated to achieve a uniform high-precision coating!
The high-performance vacuum spin coater is a device that automatically spin-coats resist liquid onto various substrates. It incorporates technology to control the atmosphere within the chamber to achieve uniform and high-precision coatings. Specifically, it automatically performs functions such as nitrogen replacement, solvent gas introduction, and maintaining a vacuum state. For more details, please contact us or refer to the catalog.
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basic information
**Features** - A device that automatically spin-coats resist liquid onto various substrates - Controls the atmosphere within the chamber → Enables uniform, high-precision coating - Automatically executes N2 replacement, solvent gas introduction, vacuum state, etc. **Specifications** - Target workpieces: 7" square, φ8", etc. - External dimensions: W1500×D1500×H1700 - Rotating part → Inner cup: Aluminum, anodized → Outer diameter φ300, sealed rotating type → Spin motor: AC servo motor 5.5KW → Rotational speed: MAX 3000rpm - Inner cup lid → MAX 3000rpm → Material: Aluminum, anodized φ300 → Rotating motor: AC servo motor 3.3KW - Outer cup: φ400 SUS304 polished - Cup cleaning mechanism: Pressurized cleaning liquid supplied from tank - Nozzle arm → Driven by stepping motor → Dispenser: 2 systems - Solvent atmosphere: Bubbling mechanism - Drying: Vacuum drying 5×10^-4 (TOrr) ● For more details, please contact us or refer to the catalog.
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Company information
Japan Create has been challenging cutting-edge technologies to respond to the diversification of the semiconductor industry with high precision, labor-saving, and miniaturization. We seek infinite possibilities in high technology and create reliable know-how that matches user needs with our uniqueness. We will continue to strive towards high-level technology.
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