High-pressure pure water is sprayed from a 2-fluid nozzle, followed by finishing cleaning with megasonic!
SRC-15001 is a sheet-type spray cleaning device. Place the item to be cleaned on the sample table, and by turning ON the start switch, the sample table begins to rotate while the nozzle arm swings the radius of the cleaning item, spraying high-pressure pure water from a two-fluid nozzle. Next, finishing cleaning is performed using megasonic waves, followed by spin drying. For more details, please contact us or refer to the catalog.
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basic information
【Features】 ○ Sheet-type spray cleaning device ○ Place the item to be cleaned on the sample stage and turn ON the start switch → The sample stage begins to rotate → At the same time, the nozzle arm swings the radius of the cleaning item → High-pressure pure water is sprayed from the two-fluid nozzle ○ Finishing cleaning executed by megasonic ○ Spin drying executed 【Specifications】 ○ External dimensions: W900×D645×H500 ○ Structure: Iron frame with anti-rust coating and PVC covering ○ Cover: Transparent PVC, manual opening and closing ○ Wafer receiving platform: Material PVC, vacuum suction or outer pin support ○ Sink: PVC ○ Nozzle arm: 1 unit, motor-driven, swinging motion ○ Megasonic: 950kHz, 60W ○ Spin motor: AC servo motor, 400W ○ Rotational speed → During megasonic: 0–500rpm → During spray cleaning: 0–500rpm → During two-fluid nozzle cleaning: 0–500rpm → During spin drying: MAX 3000rpm ○ Pure water flow rate: 1–4L/min, 0.2Mpa ○ N2 flow rate: 150–200L/min, 0.2Mpa ○ Exhaust: VP-75A, 5m³/min ○ Power supply: φ3 AC-200V, 20A ● For more details, please contact us or refer to the catalog.
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Japan Create has been challenging cutting-edge technologies to respond to the diversification of the semiconductor industry with high precision, labor-saving, and miniaturization. We seek infinite possibilities in high technology and create reliable know-how that matches user needs with our uniqueness. We will continue to strive towards high-level technology.