Ultra-high sensitivity DLTS bulk defect and interface level measurement device
DLS-1000
Effective for analyzing defects and crystal defects! Equipped with interfaces for a wide range of cryostats.
The "DLS-83D/1000" is a measurement device capable of measuring bulk defects and interface states, including temperature, frequency scans, and C-V characteristics. The "DLS-1000" supports high-sensitivity measurements of bulk defects and interface states at the level of 10^8 cm³. It comes standard with a library for easy analysis. It features a unique system that employs a high-sensitivity analog/digital method (analog for measurement and digital for data processing) and is equipped with user-friendly software. 【Features】 ■ Capable of high-sensitivity contamination detection (2x10^8 atoms/cm³) ■ Equipped with a wide range of interfaces for cryostats ■ Capable of measuring temperature, frequency scans, and C-V characteristics ■ Over 100 units delivered worldwide, demonstrating extensive track record *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Other Features】 ■ Easily identifies depth profiles, trap distribution, elements, and defects ■ Effective for analyzing defects and crystal imperfections ■ Allows for easy identification of contaminants by comparing measurement results with a list of DLTS signals of contaminants in the library ■ Unique system employing a high-sensitivity analog/digital lock-in averaging method ■ Equipped with operator-friendly software *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Main Measurement and Evaluation Items (Partial)】 ■ Capture Cross-Section Measurement ■ Electric Field Dependence Measurement ■ Trap Depth Measurement ■ MOS Measurement *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Semilab is a comprehensive measurement device manufacturer that supports research and manufacturing of cutting-edge technologies worldwide. We handle non-contact CV measurement devices, lifetime measurement devices, spectroscopic ellipsometers, photoluminescence, DLTS systems, sheet resistance measurement devices, nanoindenters, AFM, and more for the inspection of semiconductor wafers and devices. Please feel free to contact us for specifications and pricing of our devices.