TFE electron gun - 50KV high voltage power supply for electron beam lithography

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Industrial Electrical Equipment

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[TFE Electron Gun Power Supply] This is a high-performance high-voltage power supply as a composite power source. For example, in the case of a 30kV TFE power supply, the ripple noise of the acceleration power supply is 2ppm, and the stability is 5ppm/1hr, surpassing the performance of other companies. (Unit Configuration) Acceleration power supply, filament power supply, suppression power supply, extraction power supply. We can also produce power supplies for electrostatic lenses, magnetic field lenses, and control software. [OEM Production Available!] Customization and OEM production tailored to your system are possible. Charged particle beam application systems and X-ray systems can achieve high resolution and high stability only by "constructing a power supply system suited to the electron optics." This is our company policy. We can provide all the power supplies necessary for charged particle beams as solutions. Additionally, we accept OEM production of devices utilizing high-voltage power supplies, as well as custom products such as high-performance high-voltage bipolar amplifiers and high-speed pulse power supplies. [Environmentally Friendly to Meet Modern Needs!] Our high-voltage power supplies adopt a unique air insulation structure. SF6 and insulating oil are not used. As a result, running costs can be significantly reduced. We support your compliance management from various aspects.

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