500℃ temperature cycle thin film stress measurement device FLX-2320-S
A measuring device capable of accurately measuring thin film stress non-contact and non-destructively within a temperature range from room temperature to 500°C. 【Features】 ○ Calculates the change in the radius of curvature of the substrate caused by the thin film applied. The radius of curvature is calculated from the reflection angle of a laser scanning across the substrate. By measuring the radius of curvature before and after the film application and calculating the difference, the change in the radius of curvature (R) can be determined. ○ The temperature inside the measurement chamber can be freely set, allowing for a more accurate understanding of thin film characteristics under actual process and IC operating conditions. ○ An option for measuring glass substrates is also available. ● For other functions and details, please contact us.
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basic information
A measuring device capable of accurately measuring thin film stress non-contact and non-destructively within a temperature range from room temperature to 500°C. 【Features】 ○ Calculates the change in the radius of curvature of the substrate caused by the thin film applied. The radius of curvature is calculated from the reflection angle of a laser scanning across the substrate. By measuring the radius of curvature before and after the film application and calculating the difference, the change in radius of curvature (R) can be determined. ○ The temperature inside the measurement chamber can be freely set, allowing for a more accurate understanding of thin film characteristics under actual process and IC operating conditions. ○ An option for measuring glass substrates is also available. ● For other functions and details, please contact us.
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【Usage】 ○Semiconductors
Company information
The Yamato Scientific Group's management philosophy is to "support the innovation of research and development and production technology, contributing to the advancement and development of science and technology that brings happiness to humanity." Under this philosophy, we have been working to establish the trusted "Yamato brand" through our business activities. As members of the Yamato Scientific Group, our executives and employees take pride in and responsibility for the trusted "Yamato brand" that we have cultivated since our founding in 1889. We are committed to supporting cutting-edge research and development and innovation in production technology at various companies and public and private research institutions and universities in our country, which advocates for the creation of a science and technology-oriented nation. We recognize our social responsibilities and public mission, and by practicing actions based on this "Corporate Code of Conduct," we aim to gain further trust and evaluation from our customers.
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