High-Temperature Wafer Heating Hot Plate "PH860"

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last updated：Apr 07, 2014

MSAファクトリー

Official site

The plate and lifter pin are made of super heat-resistant alloy.

The high-temperature wafer heating hot plate "PH860" allows for vertical transport of wafers and other items through a lifter pin drive. The plate and lifter pins are made of ultra-heat-resistant alloy. The safety cover (optional) is available in various configurations, including with an upper opening door and without a door. 【Features】 ○ Maximum temperature: 800°C ○ Hot plate size: □175mm ○ Precise temperature control and flow control are possible with the MSA digital temperature controller. For more details, please contact us or download the catalog.

Related Link - http://msa-factory.co.jp/

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basic information

【Specifications】 ○ Temperature control range: 50 to 800℃ ○ Hot plate size: 175×175mm ○ Temperature accuracy: ±5% ○ Safety cover: Optional ○ Lifter pin: Customizable ● For more details, please contact us or download the catalog.