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  6. Programmer Glo-Spatter Coater SC-701HMCII

Programmer Glo-Spatter Coater SC-701HMCII

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last updated:Feb 07, 2024

サンユー電子
サンユー電子
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Compatible with Ni/Cr/W and more! Achieving high-precision control through software control.

The "SC-701HMCII" is a magnetron-type programmable sputter coater suitable for the fabrication of thin films such as W (tungsten), Ni (nickel), Cr (chromium), and Ti (titanium). It offers two modes of operation: full auto and manual, catering to all needs from beginner to professional use. The system control via software allows for finer and significantly more precise control of film deposition conditions. It comes standard with an automatic shutter mechanism. 【Features】 ■ Two modes of operation: full auto / manual ■ High-precision control system ■ Standard shutter device → Automatically opens/closes in conjunction with the set program ■ Real-time monitoring ■ Compact desktop-sized body For more details, please contact us or download the catalog.

    Coater
sanyu_701hmc.jpg

Programmer Glo-Spatter Coater SC-701HMCII

sanyu_701hmc.jpg
sanyu_701hmc.jpg
  • Related Link - https://www.sanyu-electron.co.jp/products/
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【Specifications】 ○ Target size: φ49 mm ○ Sample stage size: φ70 mm ○ Exhaust operation: Automatic ○ Sputtering method: DC sputtering, magnetron type ○ Sputtering current/voltage: 0–50 mA / 0–3 kV (system controlled) ○ Chamber size: 160 (φ) × 160 (D) mm (made of SUS) ○ Gas introduction mechanism: Needle valve (system controlled) ○ Exhaust device: Direct connection rotary pump 100 l/min (with automatic leak) ○ Power supply: Single-phase AC 100V 50/60Hz 10A ○ Dimensions & weight ・Main unit: 360 (W) / 422 (D) / 265 (H) mm, 20 kg ・RP: 460.5 (W) / 173.5 (D) / 264 (H) mm, 22.4 kg ● For more details, please contact us or download the catalog.

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Applications/Examples of results

【Applications and Examples of Achievements】 ○ As a DC sputtering device → Film formation of W/Ni/Cr/Ti, etc. → Fundamental experiments for fuel cells ● For more details, please contact us.

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Programmer Glo-Spatter Coater SC-701HMCII

Programmer Glo-Spatter Coater SC-701HMCII

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サンユー電子

サンユー電子

Testing, Analysis and Measurement

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The management philosophy is to "pioneer the future of research and development with core technology." Our motto is to provide those involved in research and development with what they need at the right time, while enhancing the "expandability of device functions" and offering a "variety of options." Additionally, leveraging our "agility," we strive daily to meet the diverse needs of our customers.

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