●Closed-loop control ●Equipped with absolute encoder ●Realizes battery-less operation
This is a three-axis cylindrical coordinate clean robot for super clean rooms. It is a new type of single-arm robot compatible with 2-inch to 300mm wafers, achieving low cost, high-speed transport, and no loss of step. It employs closed-loop control that prevents loss of step even under rapid load fluctuations and acceleration, further enhancing the reliability of the robot. By incorporating an absolute encoder, it can grasp its current position and reduce the time required for operation after returning to the origin. It is equipped with a mechanical multi-turn absolute sensor that does not require a battery. It is compatible with conventional models (mounting compatibility and performance compatibility), allowing for easy replacement. The high rigidity arm has a third joint equivalent to 3kgf (including wrist block, chuck, and workpiece). Arm variations: 100mm, 130mm, 160mm, 200mm. Depending on the device layout, it is possible to choose a mounting method for base type or flange type devices. A Bernoulli chuck can be mounted (optional).
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○Robot Model: SCR3160CSN-300-CM ○Transported Object: 2, 3-inch, 100-300mm wafers (also flexible customization for other special workpieces, shapes, and materials) ○Wafer Holding Method: Vacuum suction by chuck ○Machine Structure Type: Cylindrical coordinate type Control Axes: 3 axes ○Motor Type: 2-phase pulse motor for all axes ○Operating Range: Workpiece center reach distance: 552.7mm Turning Angle (θ-axis): 340 degrees Vertical Stroke (Z-axis): 300mm ○Average Transport Speed: Arm (R-axis): 610mm/sec Turning Angle (θ-axis): 340 degrees/sec Vertical Stroke (Z-axis): 250mm ○Maximum Transport Speed: Arm (R-axis): 1220mm/sec Turning Angle (θ-axis): 500 degrees/sec Vertical Stroke (Z-axis): 320mm ○Resolution: Arm (R-axis): 10.0µm or less Turning Angle (θ-axis): 0.0015 degrees Vertical Stroke (Z-axis): 2.0µm ○Repeatability: Within ±0.1mm ○Cleanliness: ISO Class 2 (during exhaust of drive unit) ○Utility: Power: DC24V±10% 15A Vacuum: -53kPa or more
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It is a 3-axis cylindrical coordinate clean robot for super clean rooms.
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◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."
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