New 450mm aligner compatible with notchless wafers.
High-speed and high-precision positioning based on the outer circumference of a 450mm silicon wafer and the T7 code or notch. Utilizes a uniquely developed image sensor, with a motor driver and controller built into the main unit. Compatible with changes in spindle shape and material. Control method: RS232C and parallel photo I/O. A type that can accommodate both 450mm and 300mm wafers can also be manufactured. A version with a Z-axis capable of wafer re-gripping operation can also be produced.
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basic information
○Transported Item: SEMI standard 450mm silicon wafer (T7 code specification, notch specification) ○Positioning Accuracy: Centering: within ±0.1mm Locating: within ±0.1 degrees ○Positioning Time: within 4 seconds ○Sensor: Wafer edge detection using image sensor unit ○With LED lighting ○Position Correction Range: within a radius of 8mm ○Wafer Holding Method: Holding by vacuum suction ○Cleanliness: ISO Class 2 (during exhaust of drive part) ○Mass: Approximately 18kg ○Utility: Current Voltage: DC24V±10% 3A Vacuum: -53kPa or higher
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Applications/Examples of results
Semiconductor manufacturing equipment, etc.
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."
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