Cassette transport system
The tilt mechanism allows for smooth cassette transport without wafer misalignment, and it can be customized to accommodate various cassette specifications. It is compatible with both batch and branch processing equipment.
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basic information
Transported object (Note 1): Open cassette for 200mm wafers (25 stages) Operating range: Arm (R-axis) Up and down stroke (Z-axis) Slider stroke (X-axis) Cassette tilt angle (tilt axis) 590mm -350mm 200mm 980mm 90 degrees Transport speed: Arm (R-axis) *Cassette not held state Up and down stroke (Z-axis) Slider stroke (X-axis) Cassette tilt angle (tilt axis) 290mm/sec 80mm/sec 130mm/sec 40 degrees/sec Cassette holding: Edge grip type chuck driven by air Repeat accuracy: ±0.2mm Mass: System body approximately 160kg (excluding installation frame) Utility: Air: 0.25±0.05MPa for cassette grip drive Various work sizes and cassette specifications can also be accommodated. Please contact us for specifications.
Price range
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Applications/Examples of results
Semiconductor manufacturing equipment, etc.
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."
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