It contributes to the miniaturization of vacuum transfer chambers.
Industry's smallest class, enabling miniaturization of equipment. Our standard vacuum robot: 65% footprint (φ95mm), 75% reduction in volume. Arbitrary reach distance can be set by combining arms.
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basic information
Robot Specifications Robot Model: TSVCR3060N-020-PM Transported Item: 2-inch Silicon Wafer Wafer Holding Method: Rough guide method using drop-in Mechanical Structure Type: Cylindrical coordinate type Control Axes: 3 axes Motor Type: Encoder-equipped 2-phase pulse motor Operating Range: Arm (R-axis) ±119mm, Swing Angle (θ-axis) 360 degrees, Vertical Stroke (Z-axis) 20mm Transport Speed: Arm (R-axis) 230mm/sec, Swing Angle (θ-axis) 450 degrees/sec, Vertical Stroke (Z-axis) 40mm/sec Repeatability: Within ±0.1mm Cleanliness Measures: Addressed with magnetic fluid seals and filters Vacuum Resistance: 1.33×10^-6 Pa Utility: Power supply: DC24V±10% 4A Mass: Robot body approximately 7kg Controller Specifications Controller Model: C4301 Series Interface: RS232C, Parallel Photo I/O This specification represents the typical specifications of the TSVCR3060N-020-PM. It may vary depending on the transported item and chuck shape.
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Applications/Examples of results
Semiconductor manufacturing equipment, etc.
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."
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