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  4. Semiconductor Manufacturing Equipment
  5. Other semiconductor manufacturing equipment
  6. Hollow Cathode Type Ion Plating Device SIH-400T

Hollow Cathode Type Ion Plating Device SIH-400T

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last updated:Jun 19, 2015

昭和真空
昭和真空
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It is equipped with a high-speed rotating mechanism for evaporation to reduce droplets.

The Holocathode Ion Plating Device SIH-400T is ideal for depositing decorative films on accessories and hardening films on tools. By varying the amount and type of introduction gases (N2, O2, C2H2), it is possible to change the color of the deposited film. 【Features】 ○ Optimal for hardening film deposition on tools ○ Film deposition recipe control via touch panel operation ○ Ideal as a small-scale production machine or experimental machine For more details, please contact us or download the catalog.

    Other semiconductor manufacturing equipment
17_sih400t.jpg

Hollow Cathode Type Ion Plating Device SIH-400T

17_sih400t.jpg
17_sih400t.jpg
  • Related Link - http://www.showashinku.co.jp/product/e_SIH-400T.ht…

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basic information

【Specifications】 ○ Vacuum chamber: Φ400 × H500mm ○ Evaporation source: HCD/Gun water-cooled hearth power supply ○ Work holding mechanism: Self-rotating jig or rotating jig ○ Work heating heater: Sheath heater ○ Measurement system: Pirani vacuum gauge, Penning vacuum gauge ○ Exhaust system: Combined molecular pump, oil rotary pump ○ Bias power supply: 100V-10A ○ Bombard power supply: 500V-1A ○ Gas introduction system: 4 systems 【Required Specifications】 ○ Size: Main unit: Approximately W1340 × D1120 × H1938 ○ Weight: Main unit: Approximately 1000kg ○ Required power: 3Φ AC200V approximately 29kVA (84A) ○ Required water volume: Approximately 1.6m3/h (approximately 27l/min) differential pressure 0.2MPa or more ○ Required air pressure: Approximately 0.5MPa or more ● For more details, please contact us or download the catalog.

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Surface hardening film / decorative film ● For more details, please contact us or download the catalog.

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Holocassette Ion Plating Device SIH-400T

Holocassette Ion Plating Device SIH-400T

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昭和真空

昭和真空

Industrial Machinery

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Showa Vacuum Co., Ltd. manufactures and sells vacuum technology application devices (vacuum equipment) such as vacuum deposition devices and sputtering devices, primarily focused on equipment that forms thin films on specific substrates in a vacuum.

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