- Closed-loop control - Equipped with absolute encoder - Achieves battery-less operation
This is a four-axis horizontal multi-joint clean robot for super clean rooms that supports wafer sizes from 2 inches to 300 mm, achieving low cost, high-speed transport, and no loss of synchronization. It can transport to parallel-arranged cassettes without a travel axis. The chuck moves linearly relative to the cassette, allowing for transport using edge grip and corner substrate transport without a travel axis. It is compatible with various wafer sizes. It employs closed-loop control that does not lose synchronization even under rapid load fluctuations or sudden acceleration, further enhancing the robot's reliability. Equipped with an absolute encoder, it can determine its current position and reduce the time required for operation after returning to the origin. It features a mechanical multi-turn absolute sensor that does not require a battery. It is compatible with conventional machines (mounting compatibility and performance compatibility), allowing for easy replacement. The robot can handle two FOUPs on its own. Depending on the equipment layout, it is possible to choose a fixation method for either base type or flange type. A Bernoulli chuck can be installed (optional).
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basic information
Robot Model: GCR4210SN-300-CM Transported Object: Up to 300mm wafer Wafer Holding Method: Held by vacuum suction using a chuck Mechanical Structure Type: Horizontal multi-joint type Control Axes: 4 axes Motor Type: Stepper motor (closed loop) Operating Range: Work center reach distance: 760mm, Turning angle (θ axis): 335 degrees, Vertical stroke (Z axis): 300mm Transport Speed: Arm (R axis): 730mm/sec, Turning angle (θ axis): 240 degrees/sec, Vertical stroke (Z axis): 200mm/sec Repeatability: Within ±0.1mm Cleanliness: ISO Class 2 or lower (ISO14644) (during exhaust of drive part) Utility: Current Voltage: DC24V±10% 15A, Vacuum: -53kPa or more (when suction chuck is mounted) Weight: Robot body approximately 26kg
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Delivery Time
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Applications/Examples of results
Semiconductor transport devices, etc.
Company information
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