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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Semiconductor inspection/test equipment
  6. Edge Inspection Handling Device (EHI-01 Type)

Edge Inspection Handling Device (EHI-01 Type)

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EHI-01

last updated:Feb 04, 2016

ジャステム
ジャステム
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This is a device for visually inspecting the edges of φ300 mm silicon wafers (chip and chipping inspection).

Five wafers are transported from the FOSB to the inspection stage, and the wafers after inspection are returned to the same slot of the same FOSB. The wafers are handled using an edge clamp method.

    Semiconductor inspection/test equipmentOther semiconductor manufacturing equipment
in_ehi01.jpg

Edge Inspection Handling Device (EHI-01 Type)

in_ehi01.jpg
in_ehi01.jpg
  • Related Link - http://www.justem.jp/product/in_ehi.php

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basic information

- The inspection stage rotates based on the operator's switch operation. The rotation speed and frequency can be set as desired. - We can accommodate requests for wafer size and tilt angle.

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Applications/Examples of results

We have received orders from the semiconductor industry.

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ジャステム

ジャステム

Industrial Machinery

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☆Dedicated Semiconductor Website Now Open!! https://www.wafer-measurement-inspection.com/ At Justem Co., Ltd., we design, manufacture, and sell automation and labor-saving machines for the wafer manufacturing process, including non-contact thickness measurement machines for wafers, wafer thickness sorting machines, automated lapping and polishing machines, and wafer transfer machines, targeting materials such as Si, SiC, and sapphire, through our unique technology development. We have provided these to many customers. We also design, manufacture, and sell specialized machines for electronic component processing and automotive parts processing. We also accept demo measurements for thickness measurement of various materials.

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