X-ray observation device for analysis with a high resolution of 0.25 μm focal spot size.
The IX-1610 is an X-ray observation device equipped with defect analysis capabilities, featuring world-class X-ray resolution. By adopting an X-ray tube with the world's smallest focal spot size of 0.25μm, it achieves high resolution. With six-axis control, it enables high-function observation and automatic inspection. 【Features】 ■ Uses a 160kV, 0.2mA, 0.25μm open-type micro-focus X-ray tube ■ X-ray geometric magnification: 1,200 times ■ Employs a transmission-type target ■ Uses a 2.8 million pixel X-ray digital I.I. tube ■ Employs a transmission-type target *For more details, please refer to the catalog or feel free to contact us.
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【Other Features】 ■ High-function observation and automatic inspection possible with 6-axis control ■ Equipped with a 360° rotating turntable, automatic sample position correction ■ Camera with 60° tilt function, automatic sample position correction ■ Automatic inspection functions, including void inspection and bridge inspection ■ Built-in PC, 24-inch LCD, keyboard included ■ Compatible with 12-inch silicon wafers *For more details, please refer to the catalog or feel free to contact us.
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For more details, please refer to the catalog or feel free to contact us.
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The "i" in i-Bit represents intelligence (information), image (visuals, images), and other types of information that we receive on a daily basis. Bit refers to the numbers used in binary code, specifically "0" and "1," which are units processed by computers. We aim to contribute to society by receiving i and using Bit.