Tabletop plasma etching device capable of localized processing with unique spot plasma technology.
The "TP-50B" is a 50W model that does not require installation permission applications under the Radio Law, and it is easy to operate, making it a tabletop plasma etching device that allows for casual plasma processing. With its unique spot plasma technology, it enables localized processing and can handle a wide range of plasma processing, from pre-treatment (exposing wiring) for semiconductor failure analysis samples to various plasma applications. Additionally, its compact size makes it suitable for research laboratories with limited space. 【Features】 ■ Compact tabletop size ■ Capable of localized plasma processing (Φ0.5mm and above) ■ Achieves low residue and high-speed processing (10μm/min) ■ Low output RF power supply (maximum output under 50W) ■ Allows for extensive processing by moving samples on a stage *For more details, please download the PDF or feel free to contact us.
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basic information
【Specifications (Excerpt)】 ■Device dimensions: 240mm(W) × 390mm(D) × 350mm(H) ■Weight: 20kg ■Vacuum pump: Dry pump (15L) ■Processing range: 28mm × 28mm (when using optional stage) 0.5~4mm ■Compatible gases: CF4, N2, D.A, Ar, O2, etc. *For more details, please download the PDF or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Surface modification ■ Removal of insulating films from semiconductor devices ■ Backside processing of semiconductor devices ■ Plasma cleaning ■ Etching of various materials *For more details, please download the PDF or feel free to contact us.
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Company information
Sanyu Manufacturing Co., Ltd. is a company with a consistent production system that encompasses everything from design to machining and assembly adjustments. In particular, our precision machining division, which possesses unique technology, and our lab automation division, which proposes automation with unique ideas, continue to receive high praise from our customers. We handle a variety of products, including evaluation testing machines for electric cables, industrial measuring instruments, automotive-related parts, medical and analytical equipment, and microfabrication-related products.