Cost reduction with over 95% recovery rate in the gold lift-off process! Cleaning equipment for LEDs.
"BEUGA" is a steam two-fluid cleaning device equipped with a multi-channel supersonic nozzle that can perform gold lift-off and resist stripping. Since it does not require expensive chemicals, it contributes to cost reduction, and in the gold lift-off process, a gold recovery rate of over 95% is achievable. The raw material is "water," which allows for a reduction in chemical use, contributing to cost reduction and a decrease in environmental impact. [Features] ■ Cost reduction ■ Improved gold recovery rate ■ Reduced environmental impact *For more details, please feel free to contact us.
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basic information
【Basic Configuration】 ■ Steam Generation Device ■ Multi-Stage Steam Injection Supersonic Nozzle ■ EFEM (Transport System) ■ Control System ■ Gas and Water Flow Control System ■ Exhaust and Drainage System 【Specifications】 ■ Wafer Diameter: 50-150mmΦ ■ Utilities: DIW, N2, CDA ■ Steam Pressure Control Range: 0.05-0.2MPa ■ Main Body Dimensions: 1200 (W) × 1500 (D) × 2200 (H) *For more details, please feel free to contact us.
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Applications/Examples of results
【Target Applications】 ■ Gold lift-off ■ Resist stripping ■ WAX and oil removal *For more details, please feel free to contact us.
Company information
HUG Power Co., Ltd. contributes to the reduction of chemical usage and the lowering of environmental impact through the development, design, and sales of industrial cleaning equipment, centered around cutting-edge cleaning technology cultivated in the semiconductor industry. With the support of many people, we have finally established a path to commercialization since 2009, and shipments to mass production lines have begun. Currently, we are dedicated to fundamentally changing the cleaning processes that use many harmful chemicals, focusing on steam cleaning technology in our daily development efforts.
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