Clean drying using high-purity IPA is possible for devices, wafers, glass, components, etc., regardless of material or shape.
【Features】 ● Clean drying using high-purity IPA is possible regardless of material or shape. ● Proven safety measures demonstrated by results. ● Elimination of the risk of damage through all stainless steel construction. ● Reduction of carried-out IPA by dividing into vapor zone and dry zone. ● Custom specification changes are possible according to customer work. *For more details, please download the PDF or contact us.
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basic information
Device Specifications: Wafer cleaning and drying using IPA Drying Target: 6-inch equivalent to 1 cassette Materials: Silicon, glass, parts, etc. Tank Configuration: One layer of stainless steel steam drying tank Heating Method: Indirect heating with aluminum heat block Device Dimensions: Width 1,050(mm) × Depth 1,200(mm) × Height 2,000(mm)
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Applications/Examples of results
Rich delivery track record Safety systems such as gas monitoring and N2 purging, as well as comprehensive safety measures including automatic fire extinguishing systems and emergency water injection systems in case of emergencies.
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Company information
We respond flexibly and promptly to customer needs. In the "trading company" functional area, we are fully committed to providing truly attractive products and services that meet customer needs by collaborating with leading specialized manufacturers and utilizing advanced mechatronics technology to add value, thereby adapting to a highly information-oriented society. In the "mechanical parking equipment" business, we manufacture and install high-quality, environmentally friendly, and safety-conscious products to meet various customer needs. Based on our accumulated wealth of experience and technology, we provide 24-hour maintenance services through a nationwide service network, earning strong trust from our customers. The "freeze-drying equipment" business consistently develops next-generation "freeze dryers," including the sealed tube-type freeze dryer, which received the Minister of Economy, Trade and Industry Award from the Japan Industrial Machinery Manufacturers Association. We deliver and maintain both small-scale research and large-scale production equipment, and we also support the development of pharmaceuticals and food, establishing ourselves as an industry leader and receiving high praise. ◆ Locations Sapporo, Hitachi, Nagoya, Osaka, Fukuoka, Yamaguchi ◆ Overseas Subsidiary Thailand - Business activities: Sales of resin molded products, metal processed products, sheet metal, packaging materials, and electronic components.
![Semiconductor wafer cleaning equipment [Customizable for each item]](https://image.mono.ipros.com/public/default/object/noimage_l.gif?w=280&h=280)
