Pursuing extreme flatness!
◆Flatness: Below 30nm◆ Our unique ultra-precision lapping process achieves extreme flatness. For example, a flatness of 30 nanometers can be achieved in a 50mm area. This technology is particularly useful for semiconductor device components, suction plates, precision stages, and other applications that require high levels of flatness. ex) Flatness: 0.1um (φ100 area)
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~Compatible Materials~ Metals: Stainless steel, nickel, copper, aluminum, molybdenum, titanium, tungsten, tantalum, general hard steel, etc. Ceramics: Alumina, SiC, Si3N4, titania, yttria, PZT, PMN-PT, etc. Plastics: General engineering plastics, acrylic, polycarbonate, etc. Glass and crystalline materials: Quartz, BK7, PYREX, etc. Semiconductor materials: Si, SiC, GaN, etc. We have extensive experience with materials not listed above, so please feel free to consult with us.
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Delivery times may vary depending on quantity and specifications, so please feel free to contact us.
Delivery Time
※Delivery times may vary depending on quantity and specifications, so please feel free to contact us.
Applications/Examples of results
Automobile (prototype) Electronic components Semiconductors
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Company information
We specialize particularly in ultra-precision mirror surface processing, with a maximum size capability of φ1500 for single-sided machines. We excel in improving flatness, parallelism, and surface roughness for precision stages and suction plates. For suction plates around φ300*10t, we produce with flatness of 0.001, parallelism of 0.001, and Ra below 0.01 (for SUS material). For φ100*5t (materials such as SUS, Ni, Ti, Mo, Ta, W, ceramics, Si, etc.), we can manufacture plates with precision of less than 0.001 in flatness and around Ra 0.001, which are used as ultra-high precision jigs and molds. ◆ Selected as one of the 300 vibrant small and medium-sized manufacturing companies in 2007. ◆ ◆ Chosen as one of the "Global Niche Top 100 Companies" by the Ministry of Economy, Trade and Industry in 2014. ◆ Selected as a "Regional Future Leading Company" by the Ministry of Economy, Trade and Industry in 2018.