High precision, high reliability IV, CV, pulsed IV, 1/f, 300mm auto-prober for RF measurements.
300mm auto-prober compatible with various on-wafer applications such as device modeling, RF and millimeter-wave measurements, WLR, and failure analysis. Agent in Japan: Vector Semiconductor Co., Ltd. 2-43-2 Nishi-Nippori, Arakawa-ku, Tokyo TEL 03-5604-1701 FAX 03-5604-1707
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basic information
Support for diverse applications of on-wafer testing - Device modeling: DC-IV, DC-CV, pulsed IV - RF and millimeter wave: 26 to 110 GHz band / above 110 GHz - WLR: high temperature / low temperature / stress testing - Failure analysis: probe card / internal node testing MPI's proprietary ShielDEnvironment chamber - Excellent EMI/RFI shielding and light-tight environment lead to ideal 1/f noise measurement results - Capable of measuring microcurrents at the fA level - Supports a wide temperature range (60°C to 300°C) - Wafer can be easily loaded from the front. Loader from the side for automatic measurement (pre-alignment) - Vertical Control Environment (VCE) technology allows observation of the probe tip from the side, enabling safe operation - Integrated active vibration isolation mechanism - Safety Test Management (STM?) function enables wafer loading/unloading at all temperatures and automatic dew point control (optional)
Price information
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Applications/Examples of results
12-inch (300mm) high-performance auto-prober
Detailed information
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The PRIME temperature chuck, integrated with the chiller's prober, features a space-saving design that allows for use in narrow laboratories and similar environments. The 300mm temperature chuck, PRIME chuck, co-designed by MPI and ERS, offers excellent flexibility and reduces the time to temperature stability to as short as 60% compared to traditional temperature chucks. Additionally, it has many advantages to consider, including superior electrical characteristics, inert gas environment compatibility, and field-upgradable options.
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ShielDCap (DC Positioner) ShielDEnvironment is a high-performance environmental chamber installed on the probe itself, achieving EMI shielding and a light-shielding environment necessary for ultra-low noise and low capacitance measurements. It can accommodate up to 8 DC/Kelvin ports. ShielDCap can be easily removed and can also be easily replaced with EMI shield-compatible probe card holders, contributing to work efficiency.
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ShildCap (RF Positioner) ShielDEnvironment can support up to 4 RF ports.
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Adoption of ERS Corporation's AC3 Cooling Technology The temperature chuck employs ERS Corporation's patented AC3 cooling technology, and when purging the air within the ShielDEnvironment, it utilizes "used" dry air, allowing for a reduction in dry air consumption by 30 to 50% compared to other companies' probers.
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Company information
The MPI AST Division handles research and development probes and high-frequency probe-related products. - Over 50 years of extensive experience in device modeling, RF/millimeter wave, WLR, high power, and failure analysis - Innovative ideas with a future-oriented perspective - Partnerships with customers and collaborators worldwide We will provide products that meet our customers' needs. Agent in Japan: Vector Semiconductor Co., Ltd. 2-43-2 Nishi-Nippori, Arakawa-ku, Tokyo TEL 03-5604-1701 FAX 03-5604-1707