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  4. Semiconductor Manufacturing Equipment
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  6. Thin film deposition device

Thin film deposition device

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last updated:Dec 09, 2019

和泉テック
和泉テック
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Production of thick films by multi-layer coating! A device with improved liquid dripping prevention for spin coating.

The "Layered Thin Film Production Device" is a layered thin film production process using a chemical solution method, which automates the repetition of the processes of spin coating, drying, firing, and cooling using a robot, enabling the automatic production of thick films through multilayer coating. With program settings controlled by a computer, it allows for detailed condition settings for each process of spin coating, drying, firing, and cooling, as well as the omission of processes, changes to the process flow, and the saving of processes at will. 【Features】 ■ Spin coating, drying, and firing can be changed at will by a CPU system ■ Each process can be operated manually, automatically, or in both modes ■ Substrate shapes can be round, square, or both ■ The spin coater is designed to prevent liquid dripping *For more details, please refer to the external link page or feel free to contact us.

    Other semiconductor manufacturing equipment
2019-12-06_14h57_47.png

Thin film deposition device

2019-12-06_14h57_47.png
2019-12-06_14h57_47.png
  • Related Link - http://www.izumi-tec.co.jp/product1.html

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【Specifications】 ■Board size: Maximum 3 inches (2 inches, 20mm square can be accommodated with chuck attachment) ■Spin coater rotation speed: 0 to 5000 rpm (±1 rpm) ■Sintering temperature: Up to 800℃ (uniform heating area 50mm) ■Board cooling: Dry nitrogen blowing ■Robot stop accuracy: ±50μm ■Dispenser: Air pulse type, droplet volume 0.05ml or more *For more details, please refer to the external link page or feel free to contact us.

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和泉テック

和泉テック

Industrial Machinery

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Izumi Tech Co., Ltd. primarily engages in the sale of scientific and physical instruments, and also conducts design and manufacturing activities as a trading company capable of producing goods. We specialize in manufacturing related to new industrial materials, environment, science, physics, electricity, architecture, and civil engineering. Please feel free to contact us if you have any requests.

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