Thickness 100um! Ultra-thin wafer transport automatic resist coating device - Coater

We have extensive experience (know-how) in the transport and coating of fragile and thin wafers such as GaAs, LT, and glass!

What concerns us about thin wafers are breakage during transport and in-plane uniformity after coating. We have confidence in transporting thin and fragile wafers, as evidenced by our track record in manufacturing wafer transport devices (wafer sorters). We can accommodate a wide range of substrates including GaAs, LT (lithium tantalate), glass (quartz), GaN, sapphire, Si, and ceramics. Additionally, thin wafers tend to have variability in in-plane uniformity during coating, but this can be significantly improved by innovating the chuck and other components. Our product comes standard with spin coating, HMDS treatment, baking, and cooling functions. Depending on customer requirements and production volume, we can adjust the number of units and offer options from manual machines to fully automated systems. Since we handle everything from design to manufacturing and sales in-house, we have achieved low prices. 【Features】 ■ Robot compatible with thin wafers ■ Chuck compatible with thin wafers ■ Achieves low prices ■ Automatic recognition of wafer sizes ■ Proven performance with a variety of chemicals ■ Reduced footprint ■ Numerous options with minimal resist ■ Lineup tailored to production volume *For more details, please refer to the PDF document or feel free to contact us.

Coater