Proven long-term stability! We provide ultra-high purification performance for high-temperature applications.
The "5850EMH Series" is a high-temperature mass flow controller with a metal seal that ensures high leak integrity and allows for flexible application support. By combining various options, it achieves advanced high-temperature gas measurement and control. At the core of this product is a highly stable sensor that displays electronic output signals and flow rates. This signal is used for display, recording, and control without the need for an automatic zero adjustment circuit. 【Features】 ■ High leak integrity (10-11 Pa.m3/s (10-10 atm.cc/s) He or less) ■ Wide flow range (0.003 to 100 slpm) ■ High-purity VAR 316L stainless steel ■ Prevents particle generation ■ Helium leak check port *For more details, please refer to the related link page or feel free to contact us.
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【Other Features】 ■ Closed valve during normal operation (option for open valve during normal operation is also available) ■ Electric valve override ■ Low command flow cutoff ■ "Valve Off" function compliant with TTL *For more details, please refer to the related link page or feel free to contact us.
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【Applications】 ■ Fiber optic manufacturing - MCVD, OVD, AVD ■ Flow steam flow control *For more details, please refer to the related link page or feel free to contact us.
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Our company provides products used in various fields, including heavy industry, oil and gas refining, research in chemistry and petrochemicals, production of pharmaceuticals and biopharmaceuticals, as well as manufacturing equipment for solar cells, LEDs, thin films, optical fibers, and semiconductors. By contributing to the environmental settings that enable process control and accurate measurements, we enhance the precision of our customers' processes, continuously supporting them to maintain their competitiveness while striving for mutual improvement, leading to the development and growth of their businesses. Please feel free to consult us if you have any requests.