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  4. Proposal for support of the old mass flow called "Legacy."
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  • Nov 08, 2019
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Nov 08, 2019

Proposal for support of the old mass flow called "Legacy."

ITWジャパン ITWジャパン
Brooks Instrument provides support for all mass flow devices previously sold by various manufacturers, including Tylan General, Mykrolis, Entegris, UNIT, Kinetics, and Celerity, as shown in the "Brooks MFC Genealogy Chart" on the right. This accounts for approximately 80% of the legacy mass flow devices in the market. In response to customer requests, we may suggest repairs in some cases, and in others, we may recommend replacement with our best-selling mass flow devices, the GF120 or GF125. We have already replaced over 20,000 units from these legacy devices to the GF series. It is possible to replace nearly all models of legacy mass flow devices featured in the "Brooks MFC Genealogy Chart." If you are having trouble with repairs or replacements of legacy mass flow devices, please feel free to consult our sales department.
Genealogy chart of Brooks MFC
Genealogy chart of Brooks MFC
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Proposal for the old mass flow support called 'Legacy' (2019.11)
Over the past 20 years, various manufacturers' mass flow devices have been sold in the market, many of which are still in operation today. Did you know that Brooks Instrument is currently consolidating the mass flow manufacturers that handled these devices and providing comprehensive support through repairs and replacement proposals?
Legacy Products
Brooks Instrument also provides factory-certified calibration and service for mass flow controller (MFC) brands such as Celerity, UNIT Instruments, Millipore, Mykrolis, Tylan, Tylan General, and Key Instruments.

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Metal Seal Mass Flow Controller/ Meter "GF125 Series"

MFC that makes everything possible

The "GF125 Series," equipped with ultra-fast response times and high levels of cleanliness, is a second-generation multivariable measurement, PTI (Pressure Variation Resistance) metal-sealed mass flow controller. It minimizes fluctuations in process gas flow due to variations in pressure and temperature. With standard MultiFlo technology, it supports thousands of combinations of gas types and ranges without disconnecting from the gas line or sacrificing accuracy. As a result, it reduces the need for pressure regulators, pressure transducers, and related hardware installations at each point, thereby shrinking the size and cost of gas panels while maximizing yield and productivity with industry-leading PTI performance. 【Features】 ■ Long-term zero stability: less than 0.5% full scale/year ■ Settling time: less than 300 ms - 700 ms ■ Maximum full-scale flow rate: 300 slpm ■ Metal-sealed flow path: 4µ inch Ra surface finish ■ SEMI F20 compliant materials for gas and liquid contact parts ■ Corrosion-resistant Hastelloy® T-Rise sensor, etc. *For more details, please download the PDF or feel free to contact us.

  • Flow Meter
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Steam Supply Module "VDM300"

Achieving the highest flow accuracy in ultra-high purity DI steam supply.

The Vapor Delivery Module (VDM) features an energy-efficient design that generates ultra-pure vaporized gas even at low temperatures. It employs proven steam delivery technology and is equipped with advanced digital control and comprehensive diagnostic functions. Compared to flash vaporization systems, it achieves superior accuracy, high flow rates, a wide control range, and low power consumption. Based on proven thermal mass flow measurement technology, it generates steam even in non-heated conditions and eliminates the influence of pure water, ensuring high reliability and cleanliness in manufacturing. An independent service port and an intuitive GUI (graphic user interface) provide user-friendly data logging and diagnostic capabilities. **Benefits** - Utilizes proven and reliable thermal mass flow measurement and control technology - Compatible with various water supply pressures - Enhanced corrosion resistance - Clean manufacturing - Tool interface using analog or digital communication - Direct interface for enhanced data collection or troubleshooting *For more details, please download the PDF or feel free to contact us.*

  • Flow Meter
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Coriolis mass flow controller/meter "QuantimQMC"

The new 3rd generation Quantim QMC Coriolis flow meter is suitable for applications involving the measurement and control of small flow rates of gases and liquids.

The Quantim® QMC Coriolis mass flow controller and meter provide extremely accurate, stable, and reproducible measurement and control for very low flow rates of gases and liquids. This third-generation new Quantim QMC Coriolis mass flow controller and meter contribute to shortening the scale-up period from lab to pilot plant to production by enhancing process quality, production yield, and throughput. The new Quantim QMC Coriolis mass flow series is compatible in terms of mounting dimensions and functionality with the old models of Quantim from Brooks Instrument. 【Features】 ■ True mass flow measurement ■ Accurate density measurement ■ Additional I/O options: 0-10 Vdc, 0-20 mA, RS485 S-Protocol ■ A wide range of seal materials, certificates, and certification options ■ Easily accessible service port *For more details, please refer to the related link page or feel free to contact us.

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Mass Flow Controller/ Meter "SLAMf Series"

Durability that withstands harsh environments! Precision mass flow control that achieves excellent accuracy.

Dust, humidity, extreme temperatures, moisture, and other harsh conditions—no matter the environment, the 'SLAMf Series' elastomer seal thermal mass flow controllers/meters achieve high precision and long-term stability unique to the proven 'SLA5800 family' of meters and controllers. The specially designed NEMA4X/IP66 rated enclosure protects advanced digital electronic components, enabling stable and accurate measurement and control of gas/fluid mass flow essential for processes. 【Features】 ■ High durability enclosure rated NEMA4X / IP66 ■ Wide range of rated flow - from 0.003 to 2500 slpm ■ Compatible with a wide range of temperature and pressure conditions ■ Achieves excellent accuracy ■ Configurable multi-gas/multi-range functionality *For more details, please refer to the related link page or feel free to contact us.

  • Flow Meter
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Elastomer Seal Mass Flow Meter "5700 Series"

Introducing cost-effective gas flow measurement for targeted applications!

The "5700 Series" is an elastomer-sealed mass flow meter designed to meet the needs of purge gas, process analysis, and flow measurement. It features electronic output signals as an alternative to turbine meters, area flow meters, and other volumetric flow meters, excelling in cost efficiency and stability. If you need a compact and economical mass flow meter that provides stable flow measurements over the long term without the need for temperature or pressure adjustments, please choose our product. 【Features】 ■ Dedicated for measurement ■ Wide flow range ■ Stainless steel gas contact materials ■ Single-sided power input ■ 0.5 V output signal *For more details, please refer to the related link page or feel free to contact us.

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Mass Flow Controller/ Meter "4800 Series"

Ultra-fast response for flow processes focused on speed! Suitable for a wide variety of non-corrosive gases.

The "4800 Series" is a thermal mass flow controller/meter with elastomer seals that improves process efficiency and productivity as response time improves. The advanced MEMS thermal sensor is equipped with a dedicated PID algorithm optimized for response to the control valve, allowing the product to quickly follow the actual flow rate even when the set point is changed arbitrarily. 【Features】 ■ Flow response time (settling time) of 0.75 seconds or less ■ Innovative MEMS sensor and dedicated PID algorithm ■ Compact size, half that of conventional thermal MFCs ■ Digital compatibility via RS-232 ■ Optional Local Operator Interface (LOI) to streamline setup and operation *For more details, please refer to the related link page or feel free to contact us.

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Mass Flow Controller/ Meter "5850E Series"

Excellent long-term stability, maintaining production accuracy! We perform highly reliable, precise, and repeatable measurements and controls.

The "5850E Series" is an elastomer-sealed thermal mass flow controller/meter. This series has a proven track record of being actively used in thousands of applications worldwide for several decades, equipped with a unique stable flow sensor that provides high reliability, accuracy, and repeatability necessary for the demanding industrial production processes of today. 【Features】 ■ Removable flow sensor ■ No influence from mounting position ■ Mechanical/electrical compatibility with other mass flow controllers ■ Electric valve override ■ Corrosion-resistant valve *For more details, please refer to the related link page or feel free to contact us.

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High-Temperature Mass Flow Controller "5850EMH Series"

Proven long-term stability! We provide ultra-high purification performance for high-temperature applications.

The "5850EMH Series" is a high-temperature mass flow controller with a metal seal that ensures high leak integrity and allows for flexible application support. By combining various options, it achieves advanced high-temperature gas measurement and control. At the core of this product is a highly stable sensor that displays electronic output signals and flow rates. This signal is used for display, recording, and control without the need for an automatic zero adjustment circuit. 【Features】 ■ High leak integrity (10-11 Pa.m3/s (10-10 atm.cc/s) He or less) ■ Wide flow range (0.003 to 100 slpm) ■ High-purity VAR 316L stainless steel ■ Prevents particle generation ■ Helium leak check port *For more details, please refer to the related link page or feel free to contact us.

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Glass Tube Area Flow Meter "Sho-Rate Series"

Proven performance at low flow rates. We offer versatile options to match various needs!

The "Show Rate Model 1350G, 1355G" is a glass tube area flow meter suitable for various types of gases and liquids. The basic structure consists of a tapered tube made of borosilicate glass, integrated into an aluminum frame along with end blocks, adapters, and valves made of 316SS. In addition, to provide appropriate configurations for various applications, other materials and flow controllers can also be selected as options. 【Features】 ■ Tapered tube replacement possible without removing the meter ■ Transparent polycarbonate cover with an enlarged lens shape for easy reading ■ Sturdy frame construction ■ Positioning block for easy centering during tapered tube installation ■ Tapered tube and float replacement possible *For more details, please refer to the PDF materials or feel free to contact us.

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Glass Tube Area Flow Meter "Model GT1600"

A flow meter that allows you to select a scale/marking specified by our company according to your desired flow rate.

The "Model GT1600" is a glass tube area flow meter made from high-quality materials selected for safe use, suitable for both indoor and outdoor applications. The scale window can be rotated 360 degrees for visibility from any preferred direction. It is also compatible with replacements for the GT1000xx series and GT1300 series Full-View products. 【Features】 ■ SUS316 stainless steel frame ■ Transparent polycarbonate cover ■ 316/316L dual-certified stainless steel fittings ■ Fittings and connection directions can be horizontal or vertical ■ Easy internal maintenance, etc. *For more details, please download the PDF or feel free to contact us.

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Metal Seal Mass Flow Controller/ Meter "GF100 Series"

Applications for gas flow control with excellent response speed and repeatability.

The "GF100 Series" is a metal-sealed mass flow controller/meter that achieves high purity and ultra-high purity process gas supply with excellent response speed and repeatability. It ensures high repeatability and stable performance, providing reliability that exceeds industry standards. It achieves the highest level of gas cleanliness in the industry while enhancing process flexibility and efficiency, maximizing yield and productivity. 【Features】 ■ Long-term zero point stability: less than 0.5% full scale/year ■ Settling time: less than 700 ms - 1 second ■ Maximum full-scale flow rate: 300 slpm ■ Metal-sealed flow path: surface finish options of 4µ or 10µ inch Ra ■ Corrosion-resistant Hastelloy(R) T-Rise sensor improves measurement reproducibility even with rising temperatures, among other features. *For more details, please download the PDF or feel free to contact us.

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Metal Tube Area Flow Meter "MT3809G Series"

Suitable for application to various gases, liquids, and vapors! A meter that accommodates a wide range of temperatures, pressures, and process ranges.

The "MT3809G Series" is a metal tube area flow meter equipped with a digital LCD display for local operator use, capable of displaying valuable process outputs such as total quantity and alarm signals. Parameters can be changed by the user without removing the cover. Changes can also be made in hazardous areas. Additionally, even when power is unavailable, communication with the control system is possible via analog or digital interfaces. 【Features】 ■ Wide flow range support - Covers from micro flow to large flow ■ Rated temperature -198°C to 420°C ■ Pressure rating: up to 6,000 psi (standard products) and up to 20,000 psi (custom models) ■ Large/small flow alarm functions compliant with SIL2 requirements ■ ATEX IIC/Class 1 Div 1 compliant 316 stainless steel explosion-proof housing suitable for harsh hazardous locations, etc. *For more details, please download the PDF or feel free to contact us.

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Fukuda's leak test, leak inspection, leak detection, leak test, integrity test.

  • NEW
  • PRODUCT

Fukuda Co., Ltd. has been pursuing leak detection for 60 years and is committed to advancing the future of leak testing. 【 Supporting Various Leak Tests: Air Leak Test / Gas Leak Test (Hydrogen Gas, Helium Gas) 】 We develop, manufacture, and sell leak testing equipment to inspect airtightness and sealing properties. We will propose the appropriate testers and devices for each inspection target. 【 Target Industries and Examples of Inspection Targets 】 - Automotive Industry: Engines, FC components, valves and piping, various parts - Electronic Components Industry: Smartphones, keyless switches, various small sensors - Pharmaceuticals / Food / Cosmetics Industry: Bottle containers, syringes, vials, eye drop containers, pillow packaging, PTP packaging We will propose the most suitable leak testers for each industry. 【 ISO Certification 】JIS Q 9001:2015 (ISO 9001:2015)

Jan 28, 2026

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HK-2

Recommended for earthquake measures for automatic doors and equipment! Seismic device HK-2.

  • NEW
  • PRODUCT

Japan is among the top 10 countries in the world with frequent earthquakes. The 2020 White Paper on Land, Infrastructure, Transport and Tourism has also reported an increase in the probability of significant earthquakes occurring. For the Nankai Trough earthquake, the probability of an earthquake with a magnitude of 8 to 9 occurring within the next 30 years is estimated to be 70 to 80%. At Hotron, we recommend the introduction of seismic devices for earthquake measures in buildings and equipment. The seismic device 'HK-2' is a product that automatically performs various controls that have been pre-set when it detects strong shaking equivalent to a seismic intensity of 5 lower or higher. For example, it can automatically execute actions such as: "Open automatic doors and gates to secure evacuation routes and access for emergency vehicles" "Transmit signals to the control room and stop facility equipment" "Unlock the keys to locked lockers" "Automatically play voice guidance" ◎ For more details, please download the materials or contact us.

Jan 28, 2026

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■■ Air-tight inspection device for electronic devices with a size of 10 mm square | MSX-7003 series ■■ Capable of fully automatic inspection of relatively large electronic components. LED, optical devices, high-frequency devices, power semiconductors, IR sensors, gyro sensors, angular velocity sensors, etc.

  • NEW
  • PRODUCT

The inspection targets of the "MSX-7003 series" are relatively large electronic devices. 【Inspection Targets】 - LED - Optical devices - High-frequency devices - Power semiconductors - IR sensors - Gyro sensors - Angular velocity sensors - Electrolytic capacitors, etc. The transport system is designed based on "pallet to pallet" to accommodate various types of work. The following three processes are performed automatically by the airtight inspection device: - Helium bombarding - Gross leak test - Fine leak test For packaged products smaller than 10 mm on each side, the work is set up using pallets or trays, followed by helium bombarding ↓ Then transported to the leak test process through high-speed handling ↓ Going through a continuous process from the gross leak test to the fine leak test ↓ And finally, discharged onto a pallet through high-speed handling. It also supports inline operations (the height of the pass line is 940 mm). Please watch the YouTube video from the link below.

Jan 28, 2026

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■■ The measurement section is made of all stainless steel! General-purpose air leak tester | FLS-0100 series ■■ Designed to meet the strict production line requirements where the use of specific metals is prohibited, such as in electronic component factories and battery factories.

  • NEW
  • PRODUCT

In battery manufacturing lines, if components containing copper are used, there is a possibility that metal powder may mix in, dissolve, ionize, and pass through the separator, causing a malfunction that connects the positive and negative electrodes. Such minute metal powders may not be detected during pre-shipment inspections, and even if they are found, they can lead to various issues, such as the need to increase inspection processes to detect them. Therefore, Fukuda has developed a copper-free (all stainless steel) air leak tester that can be safely used in the production lines of battery manufacturers and secondary battery manufacturing equipment manufacturers. For product specifications and details, please refer to the "Related Product Information" and "Related Catalogs" below.

Jan 28, 2026

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PFAS Regulation Countermeasures! ■■ Leak Test Equipment for Small Electronic Components|MSA-0101 series ■■ Does not use fluorinated inert fluids. PFAS-free. Offers accuracy equal to or better than liquid immersion testing.

  • NEW
  • PRODUCT

● This is a leak testing device for small electronic components that does not use fluorinated inert liquids (PFAS-free). ● There is no longer a need for unstable visual confirmation through liquid immersion testing. It adopts a quantitative testing method that allows for stable pressure leak testing. ● It is a tabletop leak testing device specifically for gross leaks, with accuracy equal to or greater than that of liquid immersion testing. ● The detectable range is approximately 1×10⁻² Pa·m³/s to 1×10⁻⁶ Pa·m³/s (varies depending on the target product). ● It is suitable for sealed structures ranging from a few millimeters to a maximum of 80 × 70 mm. Please feel free to contact us for more information!

Jan 28, 2026

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  • 中小企業の技術課題に対応 幅広い分野での技術開発をサポート 相談無料 依頼試験 共同研究 機器利用
  • 義務化された熱中症対策に取り組む製造現場、工場、物流倉庫へ 排気熱風なく室温-4.1℃※の冷風を 工事不要で暑さ対策 気化式スポットクーラー ※環境条件…室温35℃/湿度50%/風量「中」
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