Inverted sputtering is also possible! Equipped with a 500W high-frequency power supply, it can deposit metals, oxides, insulators, and more.
The "SP-3400" is an RF sputtering device equipped with three sources for 3-inch cathodes. It features a single 500W high-frequency power supply, enabling the deposition of metals, oxides, insulators, and more. By incorporating two automatic matching units, it allows for reverse sputtering through switching, and it also comes standard with a substrate rotation mechanism to improve the film thickness distribution during deposition. The device uses an operational touch screen, making it easy for beginners to perform automatic operation of the exhaust system, and it is equipped with safety circuits to prevent malfunctions. 【Features】 ■ Three sources for 3-inch cathodes ■ One 500W high-frequency power supply ■ Capable of depositing metals, oxides, insulators, etc. ■ Reverse sputtering is possible by switching with two automatic matching units ■ Standard substrate rotation mechanism to improve film thickness distribution during deposition ■ Operational touch screen for easy automatic operation of the exhaust system, even for beginners *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 ■ Equipped with a safety circuit to prevent malfunction ■ High-quality film formation can be achieved with clean exhaust from a turbo molecular pump ■ Cooling water circulation system and compact compressor can be equipped as options *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Founded in 1995, we are a vacuum equipment manufacturer. For over 25 years, we have been designing and manufacturing "customized equipment tailored to individual needs," focusing on various thin film devices, heat treatment furnaces, melting furnaces, and drying furnaces. We will propose solutions based on your requests, so please let us know your needs "in full."