High-Temperature Resistant Valve SCV Submersible Valve 'TD-S Series'
A valve compatible with an integrated gas system that can be used with various gases in high-temperature environments (up to 200°C).
The "TD-S Series" is a diaphragm valve compatible with integrated gas systems that incorporates unique technology, allowing it to be used in high-temperature environments. By enabling the entire valve to operate in high-temperature environments up to 200°C, efficient heating is possible. It is suitable for the supply of precursors in atomic layer deposition (ALD) processes, where reproducibility of flow rate is required. 【Features】 ■ Compatible with high-temperature environments ■ Stable Cv value ■ Use of PFA sheets ■ Usable with a wide variety of gases ■ High durability *For more details, please refer to the PDF document or feel free to contact us.
Inquire About This Product
basic information
【Other Features】 ■ Automatic Valve - Design optimized for jacket heater installation ■ Manual Valve - Equipped with LOTO (Lock-Out, Tag-Out) mechanism - Heat-resistant handle design that allows for visual confirmation of open/closed status *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
catalog（3）
Download All Catalogs
Company information
KITZ SCT combines a wide range of technologies, including metal processing and welding techniques, a spacious and clean environment, ultra-precision cleaning systems, and uniquely developed ultra-precision polishing technology, to develop, manufacture, and provide sales services for various piping components used in semiconductor manufacturing, from vacuum to high-pressure systems. Additionally, we incorporate strict quality control systems, including ISO standards and high-pressure gas certification, aiming for comprehensive cleanliness through all analyses and evaluations from material analysis to process/final products, always responding to the needs of the times.
![[Semiconductor/Class 100 Compatible] 100% Water-Free Air Nozzle](https://image.mono.ipros.com/public/product/image/2116982/IPROS15202438644694791694.png?w=280&h=280)