300mm wafer compatible large batch vertical furnace 'VF-5900'

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last updated：Jun 04, 2025

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Up to 16 FOUP stockers! Large batch vertical furnace compatible with 300mm wafers.

The "VF-5900" is a flagship model of a large batch vertical furnace equipped with a high-capacity stocker, achieving short takt times. It can process up to 100 pieces of 300mm/12-inch wafers and 16 FOUPs at once. The adoption of LGO heaters provides excellent temperature characteristics from low to medium-high temperatures. It is suitable for thermal processing of materials other than silicon wafers, such as IGBTs, polyimides, and thin wafers. 【Features】 ■ Large batch processing, capable of handling up to 100 pieces at once ■ Stocker for up to 16 FOUPs ■ Excellent temperature characteristics from low to medium-high temperatures due to LGO heater installation ■ High-speed wafer transport with a single wafer + 5-piece batch transport robot ■ Equipped with a user-friendly high-function control system *For more details, please refer to the PDF document or feel free to contact us.

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【Specifications】 ■Main body dimensions (mm): 1250(W) × 4300(D) × 3450(H) ■Heater: LGO heater ■Uniform heating length (mm): 1040 ■Wafer size (mm): 300 ■Maximum number of wafers processed: 100 wafers ■I/O ports: 2 ■FOUP stock: 16 (standard) ■Wafer transport: single wafer + 5 wafers at once ■Options: forced cooling system, N2 load lock, HOST communication (HSMS/GEM) ■Processed materials: silicon, IGBT, polyimide, thin wafers *For more details, please refer to the PDF document or feel free to contact us.