Vertical furnace with automatic transport compatible with Φ200mm wafers, usable from R&D to mass production.
The "VF-3000" is a mini-batch vertical furnace that achieves low costs suitable for downstream users. It is capable of processing mini-batches of 50 to 75 wafers and accommodates a wide range of wafer sizes up to Φ200mm. It allows for ultra-high temperature processing, making it suitable for power device manufacturing and VCSEL vertical thermal processing systems. 【Features】 - Capable of selecting mini-batch processing of 50 to 75 wafers, suitable for both R&D and mass production lines - Accommodates a wide range of wafer sizes up to Φ200mm - Maximum of 4 cassette stockers - Equipped with LGO heaters, demonstrating excellent temperature characteristics from low to medium-high temperatures - High-speed wafer transport using a single wafer handling robot *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications (Excerpt)】 ■Main body dimensions (mm): 1200(W) × 1450(D) × 2610(H) ■Heater: LGO heater ■Uniform heating length (mm): 350 to 500 ■Wafer size (mm): up to Φ200 ■Maximum number of wafers processed: 75 wafers ■I/O ports: 4 ■Cassette stock: 4 ■Wafer transport: single sheet ■Options: forced cooling system, N2 load lock, compatible with multiple wafer sizes *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Oxidation, diffusion, CVD, activation annealing treatment *For more details, please refer to the PDF document or feel free to contact us.
Company information
JTEKT Thermo System started its business by manufacturing and selling heat treatment equipment for bearing materials. Since then, it has quickly responded to technological innovations and changes in industrial structures, and has been engaged in the development of various manufacturing equipment, not only for metals but also for semiconductors, electronic components, displays, and more.
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