Up to 16 FOUP stockers! Large batch vertical furnace compatible with 300mm wafers.
The "VF-5900" is a flagship model of a large batch vertical furnace equipped with a high-capacity stocker, achieving short takt times. It can process up to 100 pieces of 300mm/12-inch wafers and 16 FOUPs at once. The adoption of LGO heaters provides excellent temperature characteristics from low to medium-high temperatures. It is suitable for thermal processing of materials other than silicon wafers, such as IGBTs, polyimides, and thin wafers. 【Features】 ■ Large batch processing, capable of handling up to 100 pieces at once ■ Stocker for up to 16 FOUPs ■ Excellent temperature characteristics from low to medium-high temperatures due to LGO heater installation ■ High-speed wafer transport with a single wafer + 5-piece batch transport robot ■ Equipped with a user-friendly high-function control system *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications】 ■Main body dimensions (mm): 1250(W) × 4300(D) × 3450(H) ■Heater: LGO heater ■Uniform heating length (mm): 1040 ■Wafer size (mm): 300 ■Maximum number of wafers processed: 100 wafers ■I/O ports: 2 ■FOUP stock: 16 (standard) ■Wafer transport: single wafer + 5 wafers at once ■Options: forced cooling system, N2 load lock, HOST communication (HSMS/GEM) ■Processed materials: silicon, IGBT, polyimide, thin wafers *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Usage】 ■Oxidation, diffusion, CVD processing *For more details, please refer to the PDF document or feel free to contact us.
Company information
JTEKT Thermo System started its business by manufacturing and selling heat treatment equipment for bearing materials. Since then, it has quickly responded to technological innovations and changes in industrial structures, and has been engaged in the development of various manufacturing equipment, not only for metals but also for semiconductors, electronic components, displays, and more.
