IONIX® Magnetron Sputter Source

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last updated：Apr 20, 2021

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The unique cooling water pathway allows the entire magnetron to be cooled at a constant temperature at all times.

We handle the rectangular type 'IONIX® Magnetron Sputter Source'. It can be installed both internally and externally. Thanks to its unique cooling water pathway, the entire magnetron can be cooled to a constant temperature at all times. Additionally, it supports KF, ISO, and CF connections, and with its unique magnetic pole arrangement, it is compatible with the UMBS configuration. 【Features】 ■ Constant temperature cooling for the entire unit ■ Installable both internally and externally ■ Supports KF, ISO, and CF connections ■ Compatible with UMBS configuration due to unique magnetic pole arrangement ■ Cooling structure that does not put stress on the target, preventing deformation of the target *For more details, please refer to the PDF document or feel free to contact us.

Related Link - https://www.foucorp.com/

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【Features of the Clamp Target】 ■ Target replacement without opening the cooling and vacuum seal ■ Power density increased up to 20W/cm2 ■ Properly secures the target ■ Closely connects the target and the plate *For more details, please refer to the PDF document or feel free to contact us.