Measure the depth of PN junction and carrier concentration distribution! Surface resistance measurement available as an option!
We would like to introduce our spread resistance measurement device, the 'SRP-170/2100'. By making contact with two probes in the depth direction on a diagonally polished Si wafer, we can measure the specific resistivity profile in the depth direction of Si, the thickness of the EPI layer, the depth of the PN junction, and the carrier concentration distribution from the spread resistance value between the probes. The "SRP2000" automates the conditioning of the probes, measurement of the bevel angle, and data input for standard samples, allowing for continuous automatic measurement of multiple samples, with a maximum of 6 samples able to be loaded simultaneously. 【Features】 ■ World-standard carrier concentration distribution and profile measurement device ■ Supports measurement automation (SRP-2100) ■ Surface resistance measurement available as an option (SRP-170) *For more details, please refer to the PDF document or feel free to contact us.
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【Main Measurement and Evaluation Items】 ■ Resistivity Profile ■ Epi Layer Thickness Measurement ■ PN Junction Depth Measurement ■ Carrier Concentration Distribution *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Semilab is a comprehensive measurement device manufacturer that supports research and manufacturing of cutting-edge technologies worldwide. We handle non-contact CV measurement devices, lifetime measurement devices, spectroscopic ellipsometers, photoluminescence, DLTS systems, sheet resistance measurement devices, nanoindenters, AFM, and more for the inspection of semiconductor wafers and devices. Please feel free to contact us for specifications and pricing of our devices.