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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. CVD Equipment
  6. Functional components for GaN semiconductor MOCVD.

Functional components for GaN semiconductor MOCVD.

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last updated:Jan 18, 2022

モメンティブ・テクノロジーズ・ジャパン
モメンティブ・テクノロジーズ・ジャパン
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Components that are resistant to high-temperature ammonia and can easily achieve high temperatures, high-temperature heaters, and structural materials. Support from single crystal growth of nitrides to wafer processing.

Momentive's "Ultra High Temperature Heaters," "Boron Nitride Product Line," and "Graphite Protective Coatings" are resistant to corrosive gas atmospheres at high temperatures and have a proven track record as functional components in nitride single crystal growth and epitaxial equipment. ■ Ultra High Temperature Heaters - Usable at ultra high temperatures (over 1500°C) - Resistant to corrosive gas atmospheres - Capable of various shapes, offering high design flexibility ■ Other Functional Components - Compatible with high-temperature processes such as MOCVD and HVPE - Custom designs according to customer specifications *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

    CVD Equipment
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Functional components for GaN semiconductor MOCVD.

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DSCF0012.JPG
  • Related Link - https://www.momentivetech.com/ja/ceramics/

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basic information

■Ultra High-Temperature Heater - Designed and manufactured according to customer requirements. - Available from one unit. ■Other Functional Components - Based on coatings such as PBN, PG, and TaC, we provide custom design and manufacturing. - Available from one unit.

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Applications/Examples of results

MOCVD, HVPE, and crystal growth of nitride semiconductors.

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Functional components for GaN semiconductor manufacturing

Functional components for GaN semiconductor manufacturing

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Heater and electrostatic chuck

Heater and electrostatic chuck

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High-temperature graphite protective coating

High-temperature graphite protective coating

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PBN Catalog

PBN Catalog

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Company information

モメンティブ・テクノロジーズ・ジャパン

モメンティブ・テクノロジーズ・ジャパン

Ceramics

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Momentive Technologies Japan Co., Ltd. develops, manufactures, and sells high thermal conductivity heat sinks, heaters/electrostatic chucks, ceramic products, and corrosion/heat-resistant coatings. We also handle a wide range of quartz and silicone products. Please feel free to contact us when you need assistance.

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