Free circular coating with a unique slit die! A new product has arrived to replace the Spiral Coater!
The "RS Coater" is a device that allows for free circular coating using a unique slit die. In addition to circular shapes, it can achieve free coating shapes that are not dependent on substrate shapes such as squares and octagons. The time required for coating a φ300mm wafer is only 30 seconds, boasting high throughput and achieving excellent quality without bubbles. 【Features】 ■ Capable of applying thick films of high-viscosity liquids (up to several hundred micrometers can be applied in one go) ■ Excellent embedding capability for patterns (with few voids) ■ No need for EBR (Edge Back Rinse), reducing the number of processes ■ Achieves overwhelming liquid-saving (the amount of coating liquid used is less than one-third of that of a spin coater) ■ Significantly reduces the amount of cleaning liquid and waste liquid, enabling more eco-friendly production ■ Capable of coating irregular materials and shapes We also provide system proposals. Example process flow: Load Port (EFEM) → Alignment → Coater → BAKE → CP → Load Port (EFEM) Drying Process Option: VCD (Vacuum Drying Device) Firing Process Option: Can be combined with Cure Ovens, etc. *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications】 ■Wafer size: 4 to 18 inches (φ450mm) ■Viscosity: 500 to 15,000 mPa·s (cps) ■Coating film thickness: 50 to 200μm/Wet ■Film thickness accuracy: Within ±3% ■Coating liquid usage efficiency: Over 90% *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Company information
Since its founding in 1945, Chugai Ro has been advancing as a technology-driven company that creates original technologies in the field of thermotech. Our core competencies lie in our development and design capabilities. However, as the engineering environment in the market matures, we have determined that it will be difficult to achieve clear differentiation from other companies solely through technical prowess. Therefore, we have been promoting the "fusion of engineering and manufacturing technology." Specifically, by consolidating the functions of development, design, and production in one location, we aim to enhance the sharing and honing of know-how across departments and functions, as well as facilitate information exchange for process reconstruction. Furthermore, we are optimizing domestic and international design, procurement, and production bases, introducing advanced design and analysis tools, and obtaining certifications for ISO 9001 and ISO 14001. We believe that these comprehensive improvements, both soft and hard, will elevate our company as a manufacturing enterprise to a new level and maximize our potential. Thermotech, which uses energy more efficiently, is in high demand not only in the industrial sector but also in general households. Moving forward, we intend to firmly embrace the significant expectations and responsibilities placed upon us in our field and respond with the unique technologies that only Chugai Ro can offer.
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