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  6. Mass production process exposure device "Fully Automatic Mask Aligner"

Mass production process exposure device "Fully Automatic Mask Aligner"

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last updated:Jul 25, 2025

三明
三明
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We offer sizes of 4 inches and 8 inches! It has high versatility compatible with round and square samples.

We would like to introduce our mass production process exposure equipment, the "Fully Automatic Mask Aligner." It achieves a simple structure at a low cost. It has high versatility compatible with circular and square samples. We offer the "ALA410" for 4-inch size and the "ALA810" for 8-inch size. 【Features】 ■ High versatility (compatible with circular and square samples) ■ Reliable spherical bearing parallel mechanism ■ Achieves low cost with a simple structure ■ Available in Φ4in, Φ6in, and Φ8in specifications ■ CToC automatic transport *For more details, please refer to the PDF document or feel free to contact us.

    Other semiconductor manufacturing equipment
2021-10-26_11h57_09.png

Mass production process exposure device "Fully Automatic Mask Aligner"

2021-10-26_11h57_09.png
2021-10-26_11h57_09.png
  • Related Link - http://www.sanmei.co.jp
  • Special site - Product/service details - https://pr.mono.ipros.com/sanmei/product/

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basic information

【Specifications】 ■Exposure light source: Illuminance distribution within ±5% ■Exposure resolution ・Soft contact L/S 3μm ・Hard contact L/S 1μm ■Alignment accuracy ・Top-side ±1μm ・Bottom-side ±3μm *For more details, please refer to the PDF document or feel free to contact us.

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【Purpose】 ■ For mass production processes *For more details, please refer to the PDF document or feel free to contact us.

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Mass production process exposure device "Fully Automatic Mask Aligner"

Mass production process exposure device "Fully Automatic Mask Aligner"

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三明

三明

Industrial Electrical Equipment

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Until now, we have continuously faced challenges with the desire to propose optimal system integration to our customers while sensitively responding to the trends of the times in industries such as paper, pulp, automotive, automotive parts, semiconductors, LCDs, and smartphones. Moving forward, we will actively enter the "three industries" of "food, pharmaceuticals, and cosmetics," which are essential for people's lives, while inheriting this way of thinking. Additionally, in fields expected to grow, such as semiconductors and high-performance LCDs, we will actively engage in the development and manufacturing of precision alignment exposure equipment, inspection equipment, and process manufacturing equipment as a device manufacturer.

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