Increased curing treatment efficiency with UV irradiation in a vacuum environment! Supports wafering up to a maximum of 8 inches! Demonstrations and customization available!
★ Increased curing efficiency with UV irradiation in a vacuum environment! ★ Compatible with wafer sizes up to 8 inches! ★ Reduced running costs without the need for nitrogen purging! ★ Ideal for wafer processing in the manufacturing process! - By setting the oxygen concentration to a vacuum environment and applying UV irradiation, curing defects are reduced. - Voids directly under the device are also removed due to the vacuum environment. Oxygen concentration at atmospheric pressure (100,000 Pa) is approximately 20%. Oxygen concentration in the vacuum chamber of this machine (5 Pa) is 0.001%. ◇ Key Performance - Achievable pressure: Below 6.0 Pa (with gas ballast closed) - Leak rate: Below 10.0 Pa/min - Maximum pumping speed: 500 L/min using a dry pump - Build-up standard value: Converted to chamber volume as 1.0 Pa・L/sec - UV irradiation performance: Achieves short-time high-output UV irradiation by adopting high-pressure mercury lamps. Example: Cumulative light amount: 550 mJ/cm² with 27.5 seconds of irradiation. - Process time: 1 process in 60 seconds or less from the start of pumping to the completion of UV irradiation. * Pre-evaluation possible with user work! * Customizable for each user!
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basic information
[Main Specifications] Device Dimensions: 590 mm (W) x 480 mm (D) x 880 mm (H) Irradiation Area: Φ 210 mm [Standard] Maximum Φ 300 mm Device Weight: 200 kg excluding pump Power Supply: Single-phase AC 200V 10 50/60Hz 1.5 kVA Air Source: Between 0.4 MPa and 0.6 MPa Control Unit: 4.3-inch TFT color LCD monitor, emergency stop, 1 USB port UV Lamp: High-pressure mercury lamp, ozone-free type Main Wavelength: 365 nm Emission Length: 200 mm Vacuum Pump: Maximum Exhaust Speed: 500 L/min
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Applications/Examples of results
Optimal for wafer processing in engineering More than three times the improvement in curing rate compared to UV irradiation at atmospheric pressure.
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Company information
KNE Corporation develops, manufactures, and sells high-level automation equipment that automatically performs tasks impossible for human hands, rather than simply replacing "jobs done by people" with automation equipment. We provide equipment that realizes our customers' "wants" and solves their "problems," such as handling fine parts measuring 0.2mm x 0.1mm and applying electronic materials with high precision. Our field extends beyond the electronic component manufacturing sector to all areas of "monozukuri" (manufacturing), including machine parts and everything else.
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