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  6. Case study of improvements using large high-precision SiC plates.

Case study of improvements using large high-precision SiC plates.

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Silicon carbide (SiC)

last updated:Mar 17, 2026

JAPAN FINE CERAMICS CO., LTD. (JFC) Tokyo Sales Office
JAPAN FINE CERAMICS CO., LTD. (JFC) Tokyo Sales Office
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We provide high-precision SiC ceramic products with a maximum size of 800 x 40t. We will introduce the benefits of adoption through proven results, such as improved device performance and resolution of thermal issues.

Metal plates are heavy and maintaining precision is difficult due to thermal deformation. Replacing them with SiC ceramics solves various problems. 【Specifications】 ■ Maximum dimensions: □800 (Φ800) x 40t ■ Flatness: 1~5μm, Parallelism: 2~10μm, Surface roughness: Ra0.4μm ※ Precision varies with dimensions and shapes. 【Main Features】 ■ Lightweight ■ High rigidity ■ Low thermal expansion ■ High thermal conductivity ■ Wear resistance 【Adoption Effects】 ■ Improved equipment performance, enhanced energy efficiency, prevention of workpiece deformation due to lightweight and high rigidity. ■ Resolution of thermal issues due to high thermal conductivity and low thermal expansion. ■ Increased lifespan due to improved wear resistance. 【SiC Product Lineup】 SCP01 → Our standard product SCP02 → Higher thermal conductivity and resistance compared to SCP01 At JFC, we produce ceramic products in-house through our unique technology, from raw material formulation to firing, processing, and inspection. We cater to your needs from small-scale prototypes to mass production. Please feel free to consult or inquire through "PDF Download" or "Contact Us."

    Other machine elementsOther semiconductor manufacturing equipmentFine Ceramics
大型高精度SiCプレート_trim.jpg

Case study of improvements using large high-precision SiC plates.

大型高精度SiCプレート_trim.jpg
大型高精度SiCプレート_trim.jpg 02_Engineering ceramics_B20121113-2.jpg
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Please leave silicon carbide (SiC) to JFC. 【Features of SiC】 ● Compared to other fine ceramics, it has a small decrease in mechanical strength at high temperatures (above 1000°C) and excellent wear resistance. ● Due to its strong covalent bonding, it is the hardest among fine ceramics, has excellent corrosion resistance, and good sliding properties in liquids. ● Suitable for bearings in mechanical seals and chemical pumps. *For detailed specifications and other information, please refer to the catalog.

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Applications/Examples of results

【Applications】 ● Sliding parts (mechanical seals, chemical pump bearings, shafts) ● Crushing machine parts (classifiers, air flow crushers, bead mills) ● Semiconductor manufacturing equipment parts (XY stages, MOCVD trays, focus rings, wafer chucks) ● Molding machine parts (glass lens molding machine parts) ● Heat-resistant parts (burner nozzles, high-temperature testing machine parts, crucibles for metal melting) ● Wear-resistant parts (blast nozzles, blades for shot blasting, protective plates for buried pipes, fishing line guides)

catalog(5)

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[Improvement Case] Large High-Precision SiC Plate

[Improvement Case] Large High-Precision SiC Plate

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Silicon carbide (SiC)

Silicon carbide (SiC)

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Engineering Ceramics Comprehensive Catalog JFC

Engineering Ceramics Comprehensive Catalog JFC

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Introduction of New Products: Engineering Ceramics

Introduction of New Products: Engineering Ceramics

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Introduction to Metal Ceramic Composite Materials (MMC) Lineup

Introduction to Metal Ceramic Composite Materials (MMC) Lineup

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Company information

JAPAN

JAPAN FINE CERAMICS CO., LTD. (JFC) Tokyo Sales Office

Ceramics

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As a member of JGC Group, JFC challenges the possibilities of the material of fine ceramics with our own technologies. We actively engage in fundamental and applied research on ceramics, product application development, as well as manufacturing and sales. We respond to the diverse needs of various advanced industries with our unique technologies and products, including high-frequency ceramic substrates and circuit components, ceramic parts for industrial machinery, and the prototyping and development of metal-ceramic composite materials (MMC).

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