Exposure device (mask aligner) compatible with Ø200mm and Ø300mm.
**Main Features** - Equipped with a self-developed mirror optical lamp house, achieving uniformity on the irradiation surface and high brightness. - Adopts a unique coaxial alignment method and high-speed image processing technology, enabling high-precision alignment. Compatible with IR methods and back-side methods. - Utilizes a proprietary optical gap sensor to set the proximity gap between the mask and substrate non-contactly with high speed and precision. - Equipped with a mask changer that can automatically exchange up to 20 photomasks. Up to 3 load ports can be installed.
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basic information
【Main Specifications】 - Size: Ø8 to Ø12” - Mask Size: □14” *We accept inquiries for various customizations.
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Since our founding, we have utilized and passed down the skills of artisans while establishing cutting-edge technology. With "quality first" and "customer priority" as our guiding principles, we strive to create products that bring joy to our customers, and thanks to the exceptional guidance and support from many, we have steadily grown to this day. We possess unique technologies in optics, precision mechanisms, electronic control, and software, and we are committed to improving our technical capabilities, particularly in exposure equipment, which is a combination of optomechatronics technologies. Additionally, we have obtained ISO 9001 and KES certifications as part of our commitment to quality and environmental management. Moving forward, we will continue to focus on creating equipment that can respond to our customers' needs in a timely manner, with an emphasis on "high quality," "short delivery times," and "low costs."
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