Aiming for a new standard in semiconductor peripheral equipment inspection! We will shorten the takt time through wide-field imaging.
The "FSM Series" is a device that measures the outer diameter dimensions of FOUP/FOSB/OC. With a 25-megapixel camera and a dedicated optical engine, it enables ultra-high-quality outer diameter measurements. It measures and inspects the top flange, side fork lift flange, step pitch for wafer mounting, and registration pinholes from various angles. Custom orders are also available. Please feel free to consult us. 【Features】 ■ Compatible with FOUP/FOSB/OC from various manufacturers ■ Capable of inspecting sizes other than the standard φ300mm and color cassettes ■ Enables ultra-high-quality outer diameter measurements with a 25-megapixel camera and dedicated optical engine ■ High-speed processing with an ultra-wide field of view achieves industry-leading throughput ■ Custom orders are also available *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 ■High Image Quality - Equipped with a 25-megapixel camera - Pixel resolution of 6μm/pix ■High Throughput - Shortened tact time through wide-field imaging - Achieved significant speedup *For more details, please refer to the PDF document or feel free to contact us.
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[Usage] ■ Top flange, side fork lift flange, step pitch for wafer mounting, and registration pin hole. *For more details, please refer to the PDF document or feel free to contact us.
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We will challenge the unknown world based on optics. The 21st century is said to be the "age of light," with remarkable advancements in optical technology. In our manufacturing company, we aim to accelerate future-oriented technological capabilities centered around "optical technology," actively tackling the information technology, ultra-fine technology, and scientific technology that the times require, and to be a dynamic company that acts swiftly. At the same time, we are committed to continuously promoting innovations suitable for the new century, striving to create safe and reliable products, and to remain a company that is needed by the world, actively working towards a richer society. We sincerely ask for your continued guidance and support.