Transport between chambers is achieved by the transfer rod! Continuous film formation is possible without releasing into the atmosphere!
This product is designed for 50×50 substrates and is a device that connects a resistance heating evaporation system for organic transistors and EL elements, as well as an RF sputtering system for oxides, to a glove box. It transports materials between chambers using a transfer rod, allowing for continuous film deposition without releasing to the atmosphere. Please feel free to contact us when you need assistance. 【Features】 ■ Compatible with 50×50 substrates ■ Continuous film deposition possible without releasing to the atmosphere ■ Connects a resistance heating evaporation system for organic transistors and EL elements, and an RF sputtering system for oxides to a glove box *For more details, please refer to the PDF materials or feel free to contact us.
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