Takeda Industrial's experimental single-sheet wet processing device "TWPm Series"
Experimental sheet-type wet processing device "TWPm Series"
A prototype sheet-type resist stripping and lift-off device for wafer surface treatment using the lift-off resist stripping process!
The prototype research device "TWPm Series" has the following features: ■ Features - Unique jet lift-off mechanism with high peeling performance - Improved flexibility and reduced running costs to accommodate small quantities of various types and fluctuations in production volume - Enhanced quality and yield through sheet processing (realization of precise processing without cross-contamination and improved uniformity and control within the plane) - Unique jet lift-off mechanism with high peeling performance - Achieved reduced footprint through compact size - Maintenance-free structure from the back - Functions inherited from conventional products - Dedicated device for one chamber * There is also a mass production "TWP Series." https://www.ipros.jp/product/detail/2000745622 * For more details, please refer to the PDF document or feel free to contact us.
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basic information
■Basic Specifications - Material: Si, compounds (GaAs, InP, Sapphire, SiC, GaN), etc. - Size: 2, 3, 4, 5, 6, 8 inches (compatible with two sizes) - Number of cleaning chambers: 1 - Scrubbing treatment: high-pressure jet / two-fluid jet / ultrasonic shower, etc. - Number of processing chambers: 2, 4 chambers - Processing liquids: organic stripping solution, rinse solution, pure water - Chemical supply: chemical circulation recovery, filtration, and temperature control system - Transport robot: transport unit - Spin chuck: vacuum chuck *Mechanical chuck compatible as an option - Equipment dimensions (WxDxH): 1,200 x 1,500 x 2,000 mm - Safety features including automatic fire extinguishing system and explosion-proof glass - Automatic cleaning function inside the chamber - Various nozzle specifications can be changed - Backside wrap prevention feature *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
Power devices, high-frequency devices, optical devices (such as LEDs), SAW devices, MEMS, etc.
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Company information
In this department, we provide total solutions for assembly by offering a diverse range of products and high technical capabilities to meet the challenges of our customers, who are globally expanding primarily in China, Thailand, Malaysia, and Vietnam. We focus on excellent assembly equipment from Panasonic Connect (formerly Panasonic Smart Factory Solutions) to support high performance, miniaturization, and lightweight electronics products, as well as peripheral equipment, technical support, and maintenance. Please take a look at our introduction video. https://www.youtube.com/watch?v=efdEd2BVT-A