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  5. Wafer processing/polishing equipment
  6. Takeda Industrial's IPA Steam Cleaning Device "TID Series"

Takeda Industrial's IPA Steam Cleaning Device "TID Series"

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IPA Steam Cleaning Device "TID Series"

last updated:Oct 06, 2022

JFE商事エレクトロニクス プロセスソリューション営業部 実装プロセス営業室
JFE商事エレクトロニクス プロセスソリューション営業部 実装プロセス営業室
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IPA steam cleaning and drying equipment! Achieving clean drying for devices, wafers, glass, and parts!

At Takeda Industrial, we utilize clean technology, transport/control technology, and other methods backed by years of experience to design and manufacture optimal equipment for our customers with our total engineering capabilities. Using various engineering tools, including 3D CAD, we deliver space-saving and user-friendly equipment. The 'TID Series' device cleans and dries wafers in an IPA (isopropyl alcohol) vapor atmosphere and is equipped with an IPA quality control system and various safety systems. ■ Features - Clean drying using high-purity IPA is possible regardless of the material or shape, including devices, wafers, glass, and components. - Comprehensive safety measures including gas monitoring, N2 purging systems, automatic fire extinguishing systems, and emergency water injection systems in case of emergencies. - Clean drying using high-purity IPA is possible regardless of the material or shape. - The use of all stainless steel eliminates the risk of breakage. - Divided into paper zones and dry zones to reduce the use of IPA. *For more details, please refer to the PDF materials or feel free to contact us.

    Wafer processing/polishing equipmentOther semiconductor manufacturing equipmentHigh pressure cleaner
IPA蒸気乾燥装置.jpg

Takeda Industrial's IPA Steam Cleaning Device "TID Series"

IPA蒸気乾燥装置.jpg
IPA蒸気乾燥装置.jpg
  • Special site - Product/service details - https://pr.mono.ipros.com/jfe-shoji-ele/product/

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■Specifications Drying target: Equivalent to 6-inch, 1 cassette Silicon wafers, glass, parts, etc. Tank configuration: One layer of stainless steel steam drying tank Indirect heating method with aluminum heat block Device dimensions (WxDxH): 1,050 x 1,200 x 2,000 mm *For more details, please refer to the PDF document or feel free to contact us.

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Devices, wafers, glass, components, etc.

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TID Series IPA Steam Cleaning Equipment by Takada Industrial Co., Ltd.

TID Series IPA Steam Cleaning Equipment by Takada Industrial Co., Ltd.

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JFE商事エレクトロニクス

JFE商事エレクトロニクス プロセスソリューション営業部 実装プロセス営業室

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In this department, we provide total solutions for assembly by offering a diverse range of products and high technical capabilities to meet the challenges of our customers, who are globally expanding primarily in China, Thailand, Malaysia, and Vietnam. We focus on excellent assembly equipment from Panasonic Connect (formerly Panasonic Smart Factory Solutions) to support high performance, miniaturization, and lightweight electronics products, as well as peripheral equipment, technical support, and maintenance. Please take a look at our introduction video. https://www.youtube.com/watch?v=efdEd2BVT-A

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The related categories of Wafer processing/polishing equipment

  • Manufacturing and processing machinery
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  • High pressure cleaner
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