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  1. Home
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  3. Control and Electrical Equipment
  4. Clean Room
  5. Other clean room equipment and facilities
  6. Fan Filter Unit (FFU)

Fan Filter Unit (FFU)

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last updated:Nov 14, 2023

TOAMEC Co.,Ltd.
TOAMEC Co.,Ltd.
  • Official site

It is possible to propose a customized FFU that fits the size of the enclosure.

We can propose a custom FFU tailored to your company's manufacturing equipment requirements. Please feel free to share any requests you may have. 【Main Customizable Specifications】 1. Flexibility in FFU dimensions We will provide the optimal FFU by combining fan motors according to the required airflow, considering compatibility with your enclosure. 2. Various filter options available In addition to HEPA, ULPA, boron-compatible, and low organic gas filters, combinations with chemical filters for the removal of acids/alkalis/organic gases are also possible. 3. Additional ports for differential pressure extraction within the chamber 4. CE marking compliant products are also available *1) There may be some requests that cannot be fully satisfied due to specifications. *2) There are some restrictions on custom models that can be CE marked. For any questions or details, please contact our office.

    Oxidation/Diffusion DeviceSemiconductor inspection/test equipmentOther clean room equipment and facilities
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Fan Filter Unit (FFU)

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basic information

【Lineup】 ■ Variable airflow type equipped with DC brushless motor ■ Single airflow type equipped with AC motor ■ Compact type equipped with AC motor ■ Custom specifications 1. Improved workability (non-seal model) - By dropping the filter inside, the protrusion of the housing is reduced to 80mm! 2. Changes in product dimensions and installation methods - Product dimensions can be manufactured as long as both the short and long sides are 400mm or more. 3. Changes in filter specifications - Compatible with various filters such as PTFE and chemical filters. 4. Stainless steel exterior specification 5. Changes in power supply specifications 【Only compatible with DC brushless motor】 1. External operation panel model 2. Compatible with centralized controllers 3. CE marking compliance available (CE compliant model) * For more details, please refer to the PDF document or feel free to contact us.

Price range

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Delivery Time

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Applications/Examples of results

【Applications】 1. Semiconductor manufacturing equipment / LCD manufacturing equipment 2. Clean rooms / Clean booths / Clean benches 3. Medical and pharmaceutical related equipment 4. Food and biotechnology related equipment 5. Precision instruments and optical equipment related equipment, etc...

Detailed information

  • DCブラシレスモーター搭載可変風量モデル1.png

    Variable airflow model equipped with a DC brushless motor □400mm *Custom sizes over 400mm are available.

  • DCブラシレスモーター搭載可変風量モデル2.png

    Variable airflow model equipped with a DC brushless motor □610mm *Custom dimensions of 400mm or more are available.

  • ノンシール.jpg

    Non-seal type installation image The filter can be dropped into the housing, and it can be installed with a thickness of 80mm on the outside of the housing!

  • ノンシールタイプ外観.png

    Non-seal type appearance The dimensions will be 30mm larger than the standard product.

  • 吸込み口スペース.png

    Inlet space Please ensure a minimum of 30mm for the DC brushless motor type and 50mm for the AC motor type.

  • DCブラシレスモーター搭載可変風量CE対応モデル.png

    DC brushless motor equipped variable airflow CE compliant model ■ Comprehensive power supply support: DC input type supports DC36V/24V AC input type supports single-phase 100-200V/200-240V ■ CE marking compliance is possible for various custom specifications - Change in product outer diameter dimensions - Change in filter specifications, compatible with ULPA and PTFE filter specifications - Change to external operation panel type

  • ステンレス仕様.png

    Stainless steel compatible products. Please contact us.

  • 集中コントローラ.png

    Central Controller ■Up to 18 units can be operated Central Controller (6 units) and expansion units (2 units, 12 units)

  • ケミカルフィルター2.png

    Compatible with special filters Supports PTFE, chemical filters, etc.

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FFU (Fan Filter Unit)

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TOAMEC

TOAMEC Co.,Ltd.

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For over 70 years since our establishment in 1951, we always receive continuous patronage from many customers and suppliers. Thank you from the bottom of our hearts. I would also like to express my appreciation to our employees for being with us in this long journey. Every year, the world continues to evolve. It makes it more difficult to predict the future, even in our industry. We are required to change the conventional business model. In order to clarify our wish and path forward, I have established our new mission and vision. In contrast to a more digitized future, we place greater value on human connections and their power, in addition to the utilization of technology. We contribute to achievements that cannot be accomplished by individuals and the realization of an affluent society. We believe the challenges that arose from changes can be regarded as opportunities for new businesses and new value creation. Moreover, we will fulfill our corporate social responsibility for the present and future society through the contribution to SDGs by Eco action 21 and the eco-related business. We look forward to see the smile of our stakeholders such as our beloved customers and suppliers in our 80th anniversary, centennial anniversary and beyond. We want to continue to aspire in the future together with all employees as we strive for continuous success. Create the future with our abilities.                            Representative Director, President                                              TAKAHASHI Yuichiro

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The related categories of Oxidation/Diffusion Device

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