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  6. Excimer laser for processing [G300K]

Excimer laser for processing [G300K]

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last updated:Jun 19, 2023

ギガフォトン
ギガフォトン
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We propose fine processing technology for next-generation package substrates using KrF excimer lasers!

The "G300K" is a processing excimer laser light source that consolidates the technology and know-how obtained from our company's manufacturing of KrF excimer lasers for semiconductor lithography. In the semiconductor backend process, it enables processing on substrates that require small vias (10μm) and trench processing, and its application to advanced substrates is anticipated in the future. [Example of processable materials] Interlayer insulating materials / solder resist, among others.

    Other semiconductor manufacturing equipment
G300K

Excimer laser for processing [G300K]

G300K GIGANEX.png
G300K GIGANEX.png
  • Related Link - https://www.ipros.jp/preview/

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basic information

We achieve fine processing with high-power short-wavelength lasers. 【Laser Basic Performance】 ■ Short wavelength (248nm) ■ High power (300W) ■ High frequency (up to 4kHz)

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  • G300K

    【Laser Basic Performance】 ■Short Wavelength (248nm) ■High Power (300W) ■High Frequency (Up to 4kHz)

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ギガフォトン

ギガフォトン

Electronic Components and Semiconductors

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Since our establishment in 2000 as an advanced company supporting the semiconductor industry, we have continuously developed new excimer lasers for semiconductor lithography equipment. We will continue to challenge ourselves based on a global business strategy, prioritizing market needs in research and development, manufacturing, and technical support.

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