Formation of passivation films such as a-SiC:H (hard films) is possible! Surface decontamination using high-density plasma.
With our product 'Corial D250L/Kayen HDRF', the application of plasma technology in the fields of bio and medical is possible. It forms passivation films for body-embedded sensors and medical devices. We can also handle surface decontamination of complex-shaped ceramic and metal implants. 【Features of Passivation Films】 ■ Currently, we can form the following four types of films that are attracting attention in the industry: - a-SiC:H (robust film) - a-C:H (inert and wear-resistant film) - SiN (stress and robustness control film) - SiO2: BioMEMS (low stress and high dielectric breakdown film) *For more details, please feel free to contact us.
Inquire About This Product
basic information
【Features of Surface Decontamination】 ■ High-density plasma for efficiently cleaning complex-shaped implants ■ Dry process that compensates for the drawbacks of liquid decontamination ■ Minimization of damage through ion flux limitation and low-temperature treatment ■ High-density O* plasma for removing organic contamination and residues ■ High-density H* plasma for removing oxide layers from metal surfaces *For more details, please feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Applications】 ■ Formation of passivation films for implantable sensors and medical devices ■ Surface decontamination of ceramics and metals for implants (complex shapes possible) *For more details, please feel free to contact us.
Company information
Our company offers etching, film deposition, and cutting equipment utilizing plasma technology, as well as the sale of ICP, RIE, DSE, IBE, IBD, PECVD, HDPCVD, and HDRF F.A.S.T.-ALD equipment, along with customer service related to these devices. Plasma-Therm LLC, headquartered in Florida, USA, was established in 1974. Since its founding, it has been manufacturing and selling semiconductor manufacturing equipment utilizing plasma technology for 48 years. Please feel free to contact us for inquiries. ▼ Group company Corial official website https://corial.plasmatherm.com/en