Turbo pump compatible! Low temperature (1100°C) / high temperature (1300°C) pyrometer.
The "AS-Master 200" is an RTP device with a rapid cooling mechanism after annealing. It supports substrates with a maximum diameter of 200mm (lamp heating from above the substrate) and can be equipped with vacuum or atmospheric transport systems and load locks. Additionally, it is compatible with processes under atmospheric and vacuum conditions and can be equipped with a turbo pump. Please feel free to consult us when needed. 【Features】 ■ Supports substrates with a maximum diameter of 200mm (lamp heating from above the substrate) ■ Low temperature (1100°C) / high temperature (1300°C) pyrometer ■ Rapid cooling mechanism after annealing ■ Compatible with atmospheric and vacuum processes ■ Turbo pump can be installed *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 ■ Mass Flow Controller: Up to 8 ■ Capable of mounting vacuum or atmospheric transport devices and load locks ■ Maximum Temperature ・ S20: 1150℃, 4 zones ・ S20 HT: 1450℃, 10 zones ・ 2000: 1250℃, 10 zones * For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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