Supports a maximum substrate size of 156mm x 156mm! Compatible with vacuum or atmospheric transport systems and can be equipped with a load lock.
The "AS-Premium" is an RTP device that supports processes under atmospheric and vacuum conditions. It features a rapid cooling mechanism after annealing (only for upper lamp heating) and is equipped with low temperature (1100°C) and high temperature (1300°C) pyrometers. Please feel free to consult us when you need assistance. 【Features】 ■ Supports substrates up to 156mm x 156mm ■ Low temperature (1100°C) / high temperature (1300°C) pyrometers ■ Rapid cooling mechanism after annealing (only for upper lamp heating) ■ Compatible with atmospheric and vacuum processes ■ Turbo pump can be installed *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 ■ Mass Flow Controller: Up to 8 ■ Capable of mounting vacuum or atmospheric transport devices and load locks ■ Maximum Temperature ・1100℃ (Lamp heating type on top of the substrate, 4 zones) ・1300℃ (Lamp heating type on top of the substrate, 8 zones) ・1300℃ (Lamp heating method on both top and bottom of the substrate, 6 zones) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Our company website features information on used equipment related to FPD and semiconductors. ● Main Business Activities Purchase of used semiconductor manufacturing equipment, refurbishment, sales, and setup operations Construction and consulting for semiconductor manufacturing lines Purchase of used FPD manufacturing equipment, refurbishment, sales, and setup operations Construction and consulting for FPD manufacturing lines Contract development, manufacturing, and sales of semiconductor manufacturing equipment and FPD manufacturing equipment Sales of various equipment parts Agency sales of overseas manufactured equipment
