Case Study: Measures to Prevent Deterioration of Centering Due to Plasma and Heat - Available for Free
Eliminate concerns about vacuum piping equipment! Presenting examples of measures against degradation of centering due to plasma and heat.
Here are some examples of product usage: - The fluorine rubber O-rings used for piping connections are deteriorating due to the effects of plasma and high-temperature exhaust from the plasma CVD equipment. - We are using expensive centering rings, but the costs are high and it is a concern. - The centering rings in the vacuum equipment are deteriorating and corroding, causing odors to leak out, which is problematic. Do you have any such concerns? KITZ SCT offers comprehensive solutions for flow path issues. If you have any specific cases you are interested in, please contact us via Ipros or our company website. Website: https://www.kitzsct.com/contact/product
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basic information
Are you having any trouble? This is a collection of case studies summarizing improvement measures for issues such as the deterioration of the centering used in the joints due to the effects of plasma, high temperatures, and gas. If you are considering centering, please take a look as a reference for your selection.
Price information
It varies depending on the product specifications. For more details, please contact us through our website.
Delivery Time
※It varies depending on the specifications, so please feel free to consult with us.
Applications/Examples of results
We are particularly considering those who are using plasma in CVD and etching equipment and are incurring high running costs due to the use of O-rings in the connections.
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Company information
KITZ SCT combines a wide range of technologies, including metal processing and welding techniques, a spacious and clean environment, ultra-precision cleaning systems, and uniquely developed ultra-precision polishing technology, to develop, manufacture, and provide sales services for various piping components used in semiconductor manufacturing, from vacuum to high-pressure systems. Additionally, we incorporate strict quality control systems, including ISO standards and high-pressure gas certification, aiming for comprehensive cleanliness through all analyses and evaluations from material analysis to process/final products, always responding to the needs of the times.
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