300mm Charge Up Monitor Wafer 'PT013'

Damage evaluation is possible through charge-up from dry etching, plasma CVD, sputtering, and ion implantation.

Our company provides solutions for test wafers backed by advanced semiconductor technology, comprehensively supporting the evaluation and development of our customers' equipment, materials, and processes. The service for evaluating charge-up damage is available for 12-inch wafers and has been globally recognized for a long time. We can evaluate charge-up for dry etching, plasma CVD, sputtering, and ion implantation. We support wafer sizes of 300mm, 200mm, and chip measurements, measuring wafers treated with plasma in our customers' equipment and providing data for I/V curves and Vbd maps. Additionally, TDDB (Qbd) measurement services are also available. *For more details, please download the PDF or feel free to contact us.

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