Contract analysis services using a high-precision quadrupole mass spectrometry system. We conduct gas analysis of sealed device interiors and bonded wafer interfaces.
Our company offers a service for gas analysis (leak measurement) of samples received from customers using a high-precision quadrupole mass spectrometry system. We employ a vacuum structural material made of 0.2% BeCu alloy with "low gas release" in our analytical equipment, enabling the detection of extremely small leaks below 10^-15 Pa·m³/s (He) through destructive testing of the device. We conduct gas analysis of the interior of sealed devices and the interface of bonded wafers. This contributes to failure analysis, quality improvement, and quality control of semiconductor devices. 【Measurement Examples】 ■ Measurement of residual and released gases between each layer of semiconductor chips ■ Measurement of gas release from semiconductor wafer substrates ■ Gas analysis of the bonded wafer interface ■ Measurement of residual gases within MEMS device chips ■ Ultra-small leak checks of sealed devices *In addition to introducing this service, you can view materials that explain the analytical system by downloading the PDF. Please feel free to contact us with any inquiries.
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basic information
【Flow of Contract Analysis】 1. Receive the test specimen 2. Check the test specimen and provide counseling on the testing method, sample holder, etc. 3. Set up on the equipment 4. Destruction of the test specimen and analysis of released gases 5. Obtain analysis data 6. Report the analysis results *For details of the service, please download and view the materials.
Price range
P4
Delivery Time
P3
Applications/Examples of results
[Related Video] We have uploaded a video report on our mass gas analysis from the Semicon Japan 2023 exhibition. Please click below: https://www.youtube.com/watch?v=88hsasysg0A
Detailed information
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We provide a service for gas analysis (leak measurement) of samples received from customers using a high-precision quadrupole mass spectrometry system. 【Flow of Contracted Analysis Service】 1. Receive the test specimen from the customer 2. Check the test specimen and provide counseling on the testing method, sample holder, etc. 3. Set up the specimen in the equipment 4. Analyze the released gas after breaking the test specimen 5. Acquire the analysis data 6. Report the analysis results to the customer
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Company information
At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.
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